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<p>Sub/spl mu/m registration between circularly symmetric fiducial marks can be achieved simply by finding their centroids by fitting circles to distributed edge positions determined by the second-derivative zero-crossing method. However, because of diffraction fringes, substantial errors originating in the tilt of the microscope optical axis must be minimized. This method is used for laser-fibre alignment tolerance studies.</p>
computer vision; optical microscopy; optical workshop techniques; optical fibres; semiconductor lasers; sub/spl mu/m registration; fiducial marks; machine vision; circularly symmetric fiducial marks; centroids; distributed edge positions; second-derivative zero-crossing method; diffraction fringes; microscope optical axis; laser-fibre alignment tolerance

M. Cohen and M. Tichem, "Sub/spl mu/m Registration of Fiducial Marks Using Machine Vision," in IEEE Transactions on Pattern Analysis & Machine Intelligence, vol. 16, no. , pp. 791-794, 1994.
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