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International Conference on Robot, Vision and Signal Processing (2011)
Kaohsiung, Taiwan
Nov. 21, 2011 to Nov. 23, 2011
ISBN: 978-0-7695-4581-3
pp: 14-17
ABSTRACT
This paper presents a novel design of a three degrees of freedom (DOFs) MEMS-based precision manipulator. The purpose of the manipulator is to position a microscope tool on the work plate doing small movement tasks. A parallel kinematic mechanism with three legs is used to convert the motion of longitudinal comb-drives into three direction translations at the end-effector. Each leg has three joints (a prismatic joint and two universal joints) which consists the basic structure of the design. The manipulator design has a high actuation flexibility combined with a relatively high stiffness due to its structure and materials. A theoretical calculation is revealed to show inverse kinematics and stiffness analysis of the design.
INDEX TERMS
MEMS, Manipulator, Parallel robot, Inverse Kinematics
CITATION
Zhongzhe Chi, Min Pan, Dan Zhang, "Design of a Three DOFs MEMS-based Precision Manipulator", International Conference on Robot, Vision and Signal Processing, vol. 00, no. , pp. 14-17, 2011, doi:10.1109/RVSP.2011.34
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