International Conference on Robot, Vision and Signal Processing (2011)
Nov. 21, 2011 to Nov. 23, 2011
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/RVSP.2011.34
This paper presents a novel design of a three degrees of freedom (DOFs) MEMS-based precision manipulator. The purpose of the manipulator is to position a microscope tool on the work plate doing small movement tasks. A parallel kinematic mechanism with three legs is used to convert the motion of longitudinal comb-drives into three direction translations at the end-effector. Each leg has three joints (a prismatic joint and two universal joints) which consists the basic structure of the design. The manipulator design has a high actuation flexibility combined with a relatively high stiffness due to its structure and materials. A theoretical calculation is revealed to show inverse kinematics and stiffness analysis of the design.
MEMS, Manipulator, Parallel robot, Inverse Kinematics
Zhongzhe Chi, Min Pan, Dan Zhang, "Design of a Three DOFs MEMS-based Precision Manipulator", International Conference on Robot, Vision and Signal Processing, vol. 00, no. , pp. 14-17, 2011, doi:10.1109/RVSP.2011.34