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International Conference on Robot, Vision and Signal Processing (2011)
Kaohsiung, Taiwan
Nov. 21, 2011 to Nov. 23, 2011
ISBN: 978-0-7695-4581-3
pp: 14-17
This paper presents a novel design of a three degrees of freedom (DOFs) MEMS-based precision manipulator. The purpose of the manipulator is to position a microscope tool on the work plate doing small movement tasks. A parallel kinematic mechanism with three legs is used to convert the motion of longitudinal comb-drives into three direction translations at the end-effector. Each leg has three joints (a prismatic joint and two universal joints) which consists the basic structure of the design. The manipulator design has a high actuation flexibility combined with a relatively high stiffness due to its structure and materials. A theoretical calculation is revealed to show inverse kinematics and stiffness analysis of the design.
MEMS, Manipulator, Parallel robot, Inverse Kinematics

Z. Chi, M. Pan and D. Zhang, "Design of a Three DOFs MEMS-based Precision Manipulator," International Conference on Robot, Vision and Signal Processing(RVSP), Kaohsiung, Taiwan, 2011, pp. 14-17.
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