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Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (1997)
Nagoya, Japan
Jan. 26, 1997 to Jan. 30, 1997
ISSN: 1084-6999
ISBN: 0-7803-3744-1
TABLE OF CONTENTS

A new MEMS wafer probe card (Abstract)

Yanwei Zhang , Dept. of Electr. & Comput. Eng., New Jersey Inst. of Technol., Newark, NJ, USA
pp. 395-399
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