The Community for Technology Leaders
MEMS, NANO, and Smart Systems, International Conference on (2005)
Banff, Alberta, Canada
July 24, 2005 to July 27, 2005
ISBN: 0-7695-2398-6
TABLE OF CONTENTS

Preface (PDF)

pp. xv

Conference Committee (PDF)

pp. xvi-xxiv

Novel one dimensional nanostructures (Abstract)

M. Meyyappan , Center for Nanotechnology, NASA Ames Res. Center, Moffett Field, CA, USA
pp. 3

The intrinsic spin Hall effect (Abstract)

S. Zhang , Dept. of Phys., Stanford Univ., CA, USA
pp. 7

Efficient spin injection using tunnel injectors (Abstract)

X. Jiang , IBM Almaden Res. Center, San Jose, CA, USA
pp. 8

Spin-transfer induced switching in magnetic nanopillars (Abstract)

J.Z. Sun , IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
pp. 9

A disjoining pressure isotherm for curved, interfacial boundaries (Abstract)

J. Gaydos , Dept. of Mech. & Aerosp. Eng., Carleton Univ., Ottawa, Ont., Canada
pp. 16
Cover
Introduction

Conference Committee (PDF)

pp. xvi-xxiv
M1: Plenary Speaker

Novel One Dimensional Nanostructures (PDF)

M. Meyyappan , Director, Center for Nanotechnology NASA Ames Research Center Moffett Field, CA 94035
pp. 3
M1A: Spintronics Symposium I

The Intrinsic Spin Hall Effect (PDF)

Shoucheng Zhang , Department of Physics, McCullough Building, Room 305 Stanford University
pp. 7

Efficient Spin Injection using Tunnel Injectors (PDF)

Xin Jiang , IBM Almaden Research Center, San Jose, CA, USA
pp. 8

Spin-transfer Induced Switching in Magnetic Nanopillars (PDF)

Jonathan Z. Sun , IBM T. J. Watson Research Center 1101 Kitchawan Road, 24-154 Yorktown Heights, NY
pp. 9

Injecting and controlling spin populations and currents in semiconductors using optically induced quantum interference effects (PDF)

Masaaki Tanaka , Department of Electronic Engineering, The University of Tokyo and Japan Science and Technology Agency
pp. 10
M1B: Symposium on Interfacial in Micro and Nano Systems I

Instability of Submicron Anisotropic Liquid Cylinders and Jets in Magnetic Field (PDF)

Y. Zimmels , Department of Civil and Environmental Engineering, Technion Haifa, Israel
L. G. Fel , Department of Civil and Environmental Engineering, Technion Haifa, Israel
pp. 13

ON THE EFFECT OF CATIONIC SURFACTANTS IN THE RINSE TO REDUCE PATTERN COLLAPSE IN HIGH ASPECT RATIO PATTERNING OF PHOTORESISTS (Abstract)

C. Bellmann , Leibniz-Institut f?r Polymerforschung Dresden e.V., Hohe Str. 6, 01069 Dresden, Germany
T. Pearce , Infineon Technologies SC300, Koenigsbruecker Str. 180, 01099 Dresden, Germany
J Reichelt , Infineon Technologies SC300, Koenigsbruecker Str. 180, 01099 Dresden, Germany
B. Pinter , Infineon Technologies SC300, Koenigsbruecker Str. 180, 01099 Dresden, Germany
M. Voigt , Infineon Technologies SC300, Koenigsbruecker Str. 180, 01099 Dresden, Germany
I. M?ge , Infineon Technologies SC300, Koenigsbruecker Str. 180, 01099 Dresden, Germany
N. Petong , Leibniz-Institut f?r Polymerforschung Dresden e.V., Hohe Str. 6, 01069 Dresden, Germany
K. Grundke , Leibniz-Institut f?r Polymerforschung Dresden e.V., Hohe Str. 6, 01069 Dresden, Germany
O. Wunnicke , Infineon Technologies SC300, Koenigsbruecker Str. 180, 01099 Dresden, Germany
M. Stamm , Leibniz-Institut f?r Polymerforschung Dresden e.V., Hohe Str. 6, 01069 Dresden, Germany
A. Drechsler , Leibniz-Institut f?r Polymerforschung Dresden e.V., Hohe Str. 6, 01069 Dresden, Germany
pp. 14-15

A DISJOINING PRESSURE ISOTHERM FOR CURVED, INTERFACIAL BOUNDARIES (PDF)

J. Gaydos , Department of Mechanical and Aerospace Engineering, Carleton University, 1125 Colonel By Drive, Ottawa, K1S 5B6, CANADA
pp. 16

Influence of Solid-Liquid-Liquid Interactions on Multiphase Transport Behavior in Porous Media (Abstract)

Dandina N. Rao , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA, USA
Subhash C. Ayirala , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA, USA
pp. 17-18
M1C: Microfuidic Systems

Non-Invasive Mapping of Fluid Temperature and Flow in Microsystems (Abstract)

Ronald J. Hugo , University of Calgary, Canada
Swavik A. Spiewak , University of Calgary, Canada
Michael J. Cyca , University of Calgary, Canada
pp. 21-26

Avery Dennison Micro-Nano Replication Capabilities for MEMS and Microfluidics (Abstract)

Philip Chu , Avery Research Center 2900 Bradley Street, Pasadena, CA 91107
pp. 27-29

A Parametric Study of Thermal Effects on the Reliability of RF MEMS Switches (Abstract)

Jonathan Lueke , University of Alberta
Aman Chahal , University of Alberta
Walied Moussa , University of Alberta
Noor Al Quddus , University of Alberta
pp. 30-31

Optimization of Turn Geometries in Microfluidic Channels (Abstract)

Zhou Deyi , Zhou Deyi
Ji Feng , Ji Feng
Zhang Peng , Zhang Peng
Zuo Chuncheng , Zuo Chuncheng
pp. 32-38
M2A: Spintronics Symposium II

Spin polarized transport effects in III-V semiconductor heterostructures (PDF)

J.-M. George , Unit? Mixte de Physique CNRS-THALES, associated with Paris XI University THALES Research and Technology, Domaine de Corbeville Orsay Cedex ? France
pp. 39

Spinwaves in Spintronics Structures (PDF)

Justin M. Shaw , Optical Sciences Center University of Arizona
Timothy M. Reith , Optical Sciences Center University of Arizona
Charles M. Falco , Optical Sciences Center University of Arizona
pp. 41

Ferromagnetic III-V Semiconductor Films with High Transition Temperature (Abstract)

L. D?weritz , Paul-Drude-Institut f?r Festk?rperelektronik, Hausvogteiplatz 5-7, D-10117 Berlin, Germany
K. H. Ploog , Paul-Drude-Institut f?r Festk?rperelektronik, Hausvogteiplatz 5-7, D-10117 Berlin, Germany
pp. 42-45
M2B: Symposium in Interfacial in Micro and Nano Systems II

New Trends in Rough Surface Characterization: When the Wrinkle is Beautiful (Abstract)

M.A. Cabrerizo-V?lchez , Biocolloid and Fluid Physics Group, Applied Physics Department, Sciences Faculty, University of Granada. Granada, Spain
M.A. Rodr?guez-Valverde , Biocolloid and Fluid Physics Group, Applied Physics Department, Sciences Faculty, University of Granada. Granada, Spain
P.J. Ram?n-Torregrosa , Biocolloid and Fluid Physics Group, Applied Physics Department, Sciences Faculty, University of Granada. Granada, Spain
pp. 47-48

Superhydrophobic Behavior of a Microtextured Surface: A Thermodynamic Approach (PDF)

W. Li , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, T6G 2G8, Canada
A. Amirfazli , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, T6G 2G8, Canada
pp. 49

Compositional Dependence of Wetting and Contact Angles in Solid-Liquid-Liquid Systems under Realistic Environments (PDF)

Wei Xu , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA, USA
C. Ayirala , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA, USA
Dandina N. Rao , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA, USA
pp. 50

Role of Patterned Surface Charge Heterogeneity on Particle Deposition (PDF)

Neda Nazemifard , Department of Mechanical Engineering, 2Department of Chemical and Materials Engineering, University of Alberta, Edmonton, AB, T6G 2G8, Canada.
Subir Bhattacharjee , Department of Mechanical Engineering, 2Department of Chemical and Materials Engineering, University of Alberta, Edmonton, AB, T6G 2G8, Canada.
Jacob H. Masliyah , Department of Mechanical Engineering, 2Department of Chemical and Materials Engineering, University of Alberta, Edmonton, AB, T6G 2G8, Canada.
pp. 52
M2C: MEMS Structure and Failure Analysis

Polysilicon Fatigue Test-Bed Monitoring Based on the 2nd Harmonic of the Device Current Measurement (Abstract)

E. Ferraris, I. Fassi , Institute of Industrial Technology and Automation - C.N.R. V.le Lombardia 20/a 20131 Milano, Italy
M. Del Sarto , MEMS Business Unit, STMicroelectronics, Via Tolomeo 1 20010 Cornaredo (Mi), Italy
B. De Masi , MEMS Business Unit, STMicroelectronics, Via Tolomeo 1 20010 Cornaredo (Mi), Italy
pp. 55-60

Deformation Analysis of Tunable Fabry-Perot Structure Caused by Thermal Residual Gradient Stresses (Abstract)

Pen-Lun Chang , Department of Mechanical and Computer-Aided Engineering, Feng Chia University, Taichung, Taiwan
Meng-Ju Lin , Department of Mechanical and Computer-Aided Engineering, Feng Chia University, Taichung, Taiwan
Shun-Wu Wang , Department of Mechanical and Computer-Aided Engineering, Feng Chia University, Taichung, Taiwan
pp. 61-64

Analysis of Tip Effects on the Dynamic Characteristics of V-shaped Atomic Force Microscope Probes (Abstract)

Kun-Nan Chen , Department of Mechanical Engineering, Tung Nan Institute of Technology, Taipei, Taiwan
Jen-Ching Huang , Department of Mechanical Engineering, Tung Nan Institute of Technology, Taipei, Taiwan
pp. 65-68

Nondestructive Evaluation of MEMS Devices by Laser Confocal Measurements (Abstract)

Ning-xin ZHANG , Institute of Microelectronics, Tsinghua University, Beijing
Xiao-ming WU , Institute of Microelectronics, Tsinghua University, Beijing
Li-tian LIU , Institute of Microelectronics, Tsinghua University, Beijing
Tian-ling REN , Institute of Microelectronics, Tsinghua University, Beijing
pp. 69-76
M3: Plenary Speaker

Impact of Nanotechnology in Flat Panel Display Industry (PDF)

Hiroshi Yokoyama , Nanotechnology Research Institute (NRI) National Institute of Advanced Industrial Science and Technology (AIST) Umezono, Tsukuba, Ibaraki 305-8568, Japan
pp. 77
M3A: Selected Topics in MEMS

Stick-slip Actuation of Electrostatic Stepper Micropositioners for Data Storage - the ?Walker (Abstract)

Stefano Stramigioli , Univ. of Twente, The Netherlands Control Engineering Laboratory
Mihai Patrascu , Univ. of Twente, The Netherlands Control Engineering Laboratory
pp. 81-86

ANN Modeling of Micro-Machined Gas Sensor Signals (Abstract)

Walied Moussa , Mechanical Engineering Department, University of Alberta, Edmonton, Alberta, Canada
Mohamed Gamal El-Din , Civil and Environmental Engineering Department, University of Alberta, Edmonton, Alberta, Canada
pp. 87-88

BioMEMS Implants for neural Regeneration after a Spinal Cord Injury (Abstract)

Medhat Moussa , University of Guelph School of Engineering Guelph, Ontario, Canada N1G 2W1
Mohamed Badran , University of Guelph School of Engineering Guelph, Ontario, Canada N1G 2W1
pp. 89-90

Large Deflection of a Polyurethane Elastomer under High Electric Field (Abstract)

Toshihiko Sugiura , Department of Mechanical Engineering, Faculty of Science and Technology, Keio University Yokohama, Japan
Yoshitaka Matsuzaki , Department of Mechanical Engineering, Faculty of Science and Technology, Keio University Yokohama, Japan
pp. 91-92
M3B: Symposium on Interfacial Phenomena in Micro and Nano Systems III

Behavior of a moving droplet under electrowetting actuation in microchannel (Abstract)

K. Mohseni , Department of Aerospace Engineering, University of Colorado, Boulder, USA
A. Dolatabadi , Department of Mechanical and Industrial Engineering, Concordia University, Montreal, Quebec, Canada
pp. 95-96

NON-LINEAR ELASTIC DEFORMATIONS OF MULTI-PHASE FLUID SYSTEMS (PDF)

J. Gaydos , Department of Mechanical and Aerospace Engineering, Carleton University, 1125 Colonel By Drive, Ottawa, K1S 5B6, CANADA
pp. 97

Thin film breakup by electric fields: Development of microfluidic applications in de-emulsification (PDF)

Jacob H. Masliyah , Department of Chemical and Materials Engineering
Subir Bhattacharjee , Department of Mechanical Engineering
Elizeusz Musial , Department of Chemical and Materials Engineering
Jan Czarnecki , Syncrude Research Center, Edmonton, AB, Canada.
Farshid Mostowfi , Department of Mechanical Engineering
pp. 98

Numerically Modeled Dynamic Response of Perfect and Leaky Dielectric Droplets in an Electric Field (PDF)

Graeme Supeene , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, T6G 2G8, Canada.
Charles R. Koch , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, T6G 2G8, Canada.
Subir Bhattacharjee , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, T6G 2G8, Canada.
pp. 99
M3C: Microfabrication Techniques

Design and Simulation of One-Port Resonant- Piezoresistive Strain Sensor (Abstract)

Walied A. Moussa , 4?9 Mechanical Engineering Building, Department of Mechanical Engineering, University of Alberta, Edmonton, Alberta T6G 2G8, Canada.
Ahmed A. S. Mohammed , 4?9 Mechanical Engineering Building, Department of Mechanical Engineering, University of Alberta, Edmonton, Alberta T6G 2G8, Canada.
pp. 103-105

LIGA Cavity Resonator for K-Band Applications (Abstract)

S. Achenbach , Institute for Microstructure Technology (IMT), Forschungszentrum Karlsruhe, Germany
D. M. Klymyshyn , Department of Electrical Engineering, University of Saskatchewan
Z. Ma , TRLabs, 111 - 116 Research Drive, Saskatoon, Saskatchewan, CANADA, S7N 3R3
pp. 106-109

MEMS Design for Fabrication (Abstract)

K. Sadek , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G8
W. Moussa , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G8
pp. 110-112

Fabrication Processes for Packaged Optical MEMS Devices (Abstract)

John Bumgarner , University of South Florida; 1College of Marine Science, 7935 114th Avenue, Largo, FL, USA
Sunny Kedia , University of South Florida; 1College of Marine Science, 7935 114th Avenue, Largo, FL, USA
Scott Samson , University of South Florida; 1College of Marine Science, 7935 114th Avenue, Largo, FL, USA
Weidong Wang , University of South Florida; 1College of Marine Science, 7935 114th Avenue, Largo, FL, USA
Shinzo Onishi , University of South Florida; 1College of Marine Science, 7935 114th Avenue, Largo, FL, USA
Rahul Agarwal , Department of Electrical Engineering, 4202 E. Fowler Avenue, Tampa, FL, USA 33620.
pp. 113-120
T1: Plenary Speaker

New Methodologies in Computational Nanoscience Facilitated by the GRID Computing Environment (PDF)

Fumio HIRATA , Institute for Molecular Science, National Institutes of Natural Sciences, Okazaki 444-8585, Japan
pp. 121
T1A: MAPNEC I

Optimizing Inhalable Nanoparticles (Abstract)

Leticia Ely , Faculty of Pharmacy and Pharmaceutical Sciences
Warren H. Finlay , Department of Mechanical Engineering
Raimar Lobenberg , Faculty of Pharmacy and Pharmaceutical Sciences
Wilson H.-Y Roa , Department of Radiation Oncology, University of Alberta, Edmonton, Alberta, Canada T6G 2N8
pp. 125-126

Aerosol Drug Delivery to the Lung Periphery Using Nano-scale Technologies (Abstract)

Thor M. WILBANKS , Aradigm Corporation, Hayward, California, USA
Jeffrey A. SCHUSTER , Aradigm Corporation, Hayward, California, USA
pp. 127-128

Novel Antimicrobial Activity of Nanocrystalline Silver Dressings (Abstract)

P.L. Burrell , Department of Biomedical Engineering, University of Alberta, Edmonton, Alberta, Canada.
T. Taylor , Department of Biomedical Engineering, University of Alberta, Edmonton, Alberta, Canada.
Olson Olson , Department of Chemical and Materials Engineering
C.R. Balasubramaniam , Department of Chemical and Materials Engineering
T., Shrum , Department of Chemical and Materials Engineering
pp. 129-134
T1B: Space Technologies I

Development of miniature visual monitoring cameras at OIP (Abstract)

Lieve De Vos , OIP Sensor Systems, Westerring 21, B-9700 Oudenaarde, Belgium
Nico Van Vooren , OIP Sensor Systems, Westerring 21, B-9700 Oudenaarde, Belgium
pp. 135-136

The Smallsat TIR Spectrometer MIBS (Abstract)

Johan Leijtens , TNO Science and Industry, Postbus 155, 2600 AD Delft
Jan Willem Lucas (Lencon) , TNO Science and Industry, Postbus 155, 2600 AD Delft
Andrew Court , TNO Science and Industry, Postbus 155, 2600 AD Delft
pp. 137-138

Towards the Miniaturization of a Space-Borne Electrostatic Energy Analyzer: the Miniature Enhanced Geometry Electrostatic Analyzer (MEGEA) (Abstract)

Peter V. Amerl , Institute for Space Research, Dept. Physics and Astronomy University of Calgary 2500 University Drive NW Alberta
Andrew W. Yau , Institute for Space Research, Dept. Physics and Astronomy University of Calgary 2500 University Drive NW Alberta
pp. 139-143

Thermal Design of an HTP Microthruster (Abstract)

WHC Halswijk , TNO Defence Security and Safety
HM Sanders , TNO Defence Security and Safety
JLPA Moerel , TNO Defence Security and Safety
pp. 143-144
T1C: Microsystems and Micromachining

Integration of Silicon Circuit Components Onto Plastic substrates Using Fluidic Self-Assembly (Abstract)

Sean A. Stauth , University of Washington Department of Electrical Engineering, Seatle WA.
Babak A. Parviz , University of Washington Department of Electrical Engineering, Seatle WA.
pp. 147-152

A High-Voltage Integrated Circuit Engine for a Dielectrophoresis-based Programmable Micro-Fluidic Processor (Abstract)

K. Wayne Currenta , University of California, Davis, CA 95616
Jody V. Vykoukal , University of Texas, Houston, TX 77030
Kelvin Yuka , University of California, Davis, CA 95616
Charles McConaghy , Lawrence Livermore National Laboratory, Livermore, CA 94551
Peter R. C. Gascoyne , University of Texas, Houston, TX 77030
Jon A. Schwartz , University of Texas, Houston, TX 77030
Craig Andrews , Lynntech, Inc. College Station, TX 77845
pp. 153-158

Patterning Nanometer Resist Features on Planar and Topography Substrates Using The 2-Step NERIME FIB Top Surface Imaging Process (Abstract)

Arous Arshak , University of Limerick, Ireland
Olga Korostynska , University of Limerick, Ireland
Stephen F. Gilmartin , Analog Devices, Raheen, Limerick, Ireland
Damian Collins , Analog Devices, Raheen, Limerick, Ireland
Khalil Arshak , University of Limerick, Ireland
pp. 159-166
T1D: Symposium on Interfacial Phenomena in Micro and Nano Systems IV

Genetically Engineered Polypeptide for Differential Recognition of Platinum on Microfabricated Structures (Abstract)

Mehmet Sarikaya , Material Science and Engineering Department,University of Washington, Seattle, WA 98195
Candan Tamler , Material Science and Engineering Department
Mustafa Gungormus , Material Science and Engineering Department
Xiaorong Xiong , Department of Electrical Engineering
Babak A. Parviz , Department of Electrical Engineering,University of Washington, Seattle, WA 98195
pp. 167-171

Dynamic effects on Peptide Structure: Molecular dynamics simulations of a peptide employing ensemble of peptides (PDF)

Kamaljit Kaur , Faculty of Pharmacy and Pharmaceutical Sciences, University of Alberta, Edmonton, Alberta
pp. 172

Interfacial Behavior of Complex Hydrocarbon Fluids at Elevated Pressures and Temperatures (Abstract)

Subhash C. Ayirala , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA 70803-6417, USA
Dandina N. Rao , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA 70803-6417, USA
Wei Xu , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA 70803-6417, USA
pp. 173

Superparamagnetic Particle Embedded Microprobe (SPEM) for GMR Sensor Sensitivity Calibration (Abstract)

Franz-Josef Hormes , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA 70803-6417, USA
Kun Lian , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA 70803-6417, USA
Min Zhang , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA 70803-6417, USA
Jost Goettert , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA 70803-6417, USA
Pratul K. Ajmeraa , The Craft and Hawkins Department of Petroleum Engineering Louisiana State University Baton Rouge, LA 70803-6417, USA
pp. 175-178
T2A: MAPNEC II

Generation and Recovery of Sub-Micron Diameter Fibrous Aerosols (Abstract)

M.J. Brett , Department of Electrical and Computer Engineering, University of Alberta, Canada
W.H. Finlay , Department of Mechanical Engineering, University of Alberta, Canada
A.R. Martin , Department of Mechanical Engineering, University of Alberta, Canada
D. Vick , Department of Electrical and Computer Engineering, University of Alberta, Canada
pp. 180-181

Model Studies of Magnetic Particle Retention in the Conducting Airways (Abstract)

J. ALLY , Departments of Mechanical Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2G8
W. ROA , Departments of Oncology,, University of Alberta, Edmonton, Alberta, Canada, T6G 2G8
A. AMIRFAZLI , Departments of Mechanical Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2G8
pp. 182-184

Towards a Mechanism for Nanocrystalline Silver Efficacy in the Wound Environment: Structure Versus Size (Abstract)

J, Taylor , Department of Biomedical Engineering, University of Alberta, Edmonton, Alberta, Canada.
P.L., Christensen , Department of Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta, Canada.
Shrum Shrum , Department of Chemical and Materials Engineering and Biomedical Engineering, University of Alberta, Edmonton, Alberta, Canada.
N., McCaffrey , Department of Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta, Canada.
W.C. Burrell , Department of Biomedical Engineering, University of Alberta, Edmonton, Alberta, Canada.
pp. 185-189
T2B: Space Technologies II

RF MEMS FOR SPACE APPLICATIONS (Abstract)

R. R. Mansour , University of Waterloo, Waterloo, Ontario, Canada
pp. 191-192

Micro Systems Technology: the way to shrink sunsensors (Abstract)

Johan Leijtens , TNO Science and industry, Postbus 155, 2600
Nico van der Heiden , TNO Science and industry, Postbus 155, 2600
Kees de Boom , TNO Science and industry, Postbus 155, 2600
pp. 193-194

The development of a Cryogenic Optical Delay Line for DARWIN (Abstract)

T. C. van den Dool , TNO Science and Industry, Stieltjesweg 1, 2628 CK, Delft, THE NETHERLANDS
F. Kamphues , TNO Science and Industry, Stieltjesweg 1, 2628 CK, Delft, THE NETHERLANDS
pp. 195-196

Next Generation Microbolometers for High Resolution Remote Sensing (Abstract)

H. Jerominek , INO, Canada
L. Ngo Phong , Canadian Space Agence, Canada
S. Elias , INO, Canada
T. D. Pope , INO, Canada
C. Alain , INO, Canada
W. Zheng , Canadian Space Agence, Canada
J. Lee , Canadian Space Agence, Canada
pp. 197-198
T2C: Theory and Modeling on Multiple Scales

Finite Temperature Multiscale Computational Modeling of Materials at Nanoscale (Abstract)

Dennis D. Klug , Steacie Institute for Molecular Science, National Research Council, Ottawa, ON, Canada
Behrouz Shiari , Steacie Institute for Molecular Science, National Research Council, Ottawa, ON, Canada
Ronald E. Miller , Department of Mechanical and Aerospace Engineering, Carleton University, Ottawa, ON, Canada
pp. 201-206

Microscopic Theory of Liquid Interfaces in Molecular Systems (Abstract)

Andriy KOVALENKO , National Institute for Nanotechnology, National Research Council of Canada and Department of Mechanical Engineering, University of Alberta, Edmonton, Canada
pp. 209-213

Theoretical Study of Pressure and Cosolvent Effects on the Solvation Structure of Staphylococcal Nuclease (Abstract)

Takeshi YAMAZAKI , University of Alberta and National Institute for Nanotechnology, University of Alberta, 9107-116 St., Edmonton, AB, Canada
Andriy KOVALENKO , University of Alberta and National Institute for Nanotechnology, University of Alberta, 9107-116 St., Edmonton, AB, Canada
pp. 214-215
T2D: Symposium on Interfacial Phenomena in Micro and Nano Systems V

Electrokinetic Flow in a Wavy Channel (Abstract)

Noor Al Quddus , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, Canada
Walied Moussa , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, Canada
Subir Bhattacharjee , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, Canada
pp. 219-220

Hydrogel Microvalve Device Modeling and Simulation (Abstract)

Walied A. Moussa , Mechanical Engineering Department, University of Alberta, Edm, AB, Canada
Ibrahim M. W. A , Mechanical Engineering Department, University of Alberta, Edm, AB, Canada
Saunders J. R. , Mechanical Engineering Department, University of Alberta, Edm, AB, Canada
pp. 221-222

Using Insolubility Wave-Front for Polymer Deposition on Self-Assembling Microfabricated Parts (Abstract)

Harvey Ho , University of Washington Department of Electrical Engineering, Seattle, WA 98195
Babak A. Parviz , University of Washington Department of Electrical Engineering, Seattle, WA 98195
Christopher J. Morris , University of Washington Department of Electrical Engineering, Seattle, WA 98195
pp. 223-227

Transient behaviour of streaming potential development in microfluidic channels (Abstract)

Larry Kostiuk , Department of Mechanical Engineering, University of Alberta, Edmonton AB, T6G 2G8,Canada
Carl Scheuerman , Department of Mechanical Engineering, University of Alberta, Edmonton AB, T6G 2G8,Canada
Daniel Y. Kwok , Department of Mechanical Engineering, University of Alberta, Edmonton AB, T6G 2G8,Canada
Ali Mansouri , Department of Mechanical Engineering, University of Alberta, Edmonton AB, T6G 2G8,Canada
Subir Bhattacharjee , Department of Mechanical Engineering, University of Alberta, Edmonton AB, T6G 2G8,Canada
pp. 228
T3: Plenary Speaker

New World in Soft-Nano-Materials (PDF)

Atsushi NAKAJIMA , Discovery Institute, RIKEN, Wako, 351-0198 Saitama, Japan
Masaaki MITSUI , Department of Chemistry, Keio University, Hiyoshi, Yokohama, Japan
Koji KAYA , Discovery Institute, RIKEN, Wako, 351-0198 Saitama, Japan
pp. 231
T3A: RF MEMS

MEMS Relays/Switches (Abstract)

Yan Loke , Micralyne Inc., Edmonton, Canada
Tiansheng Zhou , Micralyne Inc., Edmonton, Canada
pp. 235-236

Modeling, Simulation, and Testing of the Mechanical Dynamics of an RF MEMS Switch (Abstract)

Hartono SUMALI , Sandia National Laboratories, Albuquerque, New Mexico, USA
Jordan E. MASSAD , Sandia National Laboratories, Albuquerque, New Mexico, USA
David S. EPP , Sandia National Laboratories, Albuquerque, New Mexico, USA
Christopher W. DYCK , Sandia National Laboratories, Albuquerque, New Mexico, USA
pp. 237-240

Characteristics of fiber Bragg grating temperature sensor at elevated temperatures (Abstract)

Bowei Zhang , Department of Electrical and Computer Engineering, Concordia University
Mojtaba Kahrizi , Department of Electrical and Computer Engineering, Concordia University
pp. 241-246

ADVANCED MEMS FOR HIGH POWER INTEGRATED DISTRIBUTION SYSTEMS (Abstract)

Josef Drobnik , L-3 Communications - Power Paragon
Rahim Kasim , Arizona State University
Bruce C. Kim , The University of Alabama
pp. 247-254
T3B: Space Missions

Advanced Microphotonic and MEMS Technologies for the MEOS Microsatellite Earth Observation Mission (Abstract)

Brian Wong , MPB Communications Inc.
Roman V. Kruzelecky , MPB Communications Inc.
Wes Jamroz , MPB Communications Inc.
Emile Haddad , MPB Communications Inc.
Linh Ngo-Phong , Canadian Space Agency
Jing Zou , MPB Communications Inc.
Wanping Zheng , Canadian Space Agency
pp. 255-260

The Dutch MST Program MicroNed and its Cluster MISAT (Abstract)

W. Jongkind , Faculty of Aerospace, Delft University of Technology, The Netherlands
pp. 261-262

Nano-satellites, a fast way to pre-qualify new micro-technology (Abstract)

R.J. Hamann , Faculty Aerospace Engineering, Delft University of Technology, The Netherlands
C.J.M. Verhoeven , Faculty EEMCS, Delft University of Technology
A.R. Bonnema , Faculty of Aerospace Engineering, Delft University of Technology
pp. 263-264

Microbolometer Instrument Payload Design for a Microsatellite Mission (Abstract)

T.D. Pope , INO, 2740 Einstein, Ste-Foy, Quebec, Canada
Linh NgoPHONG , CSA, 6767 route de l?Aeroport, Saint-Hubert, Canada
W.F. Payne , Routes AstroEngineering Ottawa ON, Canada
J. V. Gore , Gore Space Systems Ottawa ON, Canada
Wanping Zheng , CSA, 6767 route de l?Aeroport, Saint-Hubert, Canada
pp. 265-273
T3C: BioMEMS Applications

Performance of a 512x3 Pixel Microbolometer Detector for Space Imaging Applications (Abstract)

T.D. Pope , INO, 2740 Einstein, Sainte-Foy, Qu?bec, Canada G1P 4S4
W. Zheng , CSA, 6767 route de l'A?roport, Saint-Hubert, Qu?bec, Canada J3Y 8Y9
L. Le Noc , INO, 2740 Einstein, Sainte-Foy, Qu?bec, Canada G1P 4S4
L. Ngo Phong , CSA, 6767 route de l'A?roport, Saint-Hubert, Qu?bec, Canada J3Y 8Y9
C. Alain , INO, 2740 Einstein, Sainte-Foy, Qu?bec, Canada G1P 4S4
H. Jerominek , INO, 2740 Einstein, Sainte-Foy, Qu?bec, Canada G1P 4S4
pp. 275-276

Optical MEMS pressure sensor using ring resonator on a circular diaphragm (Abstract)

T. Srinivas , Department of Electrical Communication Engineering Indian Institute of Science, Bangalore 560012, India
A. Selvarajan , Department of Electrical Communication Engineering Indian Institute of Science, Bangalore 560012, India
Prasant Kumar Pattnaik , Department of Electrical Communication Engineering Indian Institute of Science, Bangalore 560012, India
Bh. Vijayaaditya , Department of Electrical Communication Engineering Indian Institute of Science, Bangalore 560012, India
pp. 277-280

Modal Analysis of Microgrippers used in Assembly of MEMS Devices (Abstract)

William L. Cleghorn , Department of Mechanical and Industrial Engineering University of Toronto, Toronto, ON M5S 3G8
James K. Mills , Department of Mechanical and Industrial Engineering University of Toronto, Toronto, ON M5S 3G8
Yasser H. Anis , Department of Mechanical and Industrial Engineering University of Toronto, Toronto, ON M5S 3G8
pp. 281-286

Reconfigurable Ground Plane Membranes for Analog/Digital Microstrip Phase Shifters and Frequency Agile Antenna (Abstract)

C. Shafai , Department of Electrical and Computer Engineering, University of Manitoba Winnipeg, Manitoba, Canada, R3T 5V6
Satish K. Sharma , Department of Electrical and Computer Engineering, University of Manitoba Winnipeg, Manitoba, Canada, R3T 5V6
L. Shafai , Department of Electrical and Computer Engineering, University of Manitoba Winnipeg, Manitoba, Canada, R3T 5V6
R. Al-Dahleh , Electrical and Computer Engineering Department, University of Waterloo 200 University Avenue West, Waterloo, Ontario, Canada, N2L 3G1
Dwayne D. Chrusch , Department of Electrical and Computer Engineering, University of Manitoba Winnipeg, Manitoba, Canada, R3T 5V6
pp. 287-290
T3D: Symposium on Interfacial Phenomena in Micro and Nano Systems VI

Effect of Gravity on the Macroscopic Advancing Contact Angle: An Experimental Investigation (Abstract)

W. Elliott , Department of Chemical and Materials Engineering, University of Alberta, Edmonton, AB, Canada
A. Amirfazli , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G8
A. Ababneh , Department of Mechanical Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G8
pp. 293-294

Molecular Dynamics Simulation of the Rupture of Nanometer-Sized Oil/Water Interface (PDF)

Jacob H. Masliyah , Department of Chemical and Materials Engineering , University of Alberta, Edmonton, AB T6G 2G8, Canada.
Subir Bhattacharjee , Department of Mechanical Engineering, University of Alberta, Edmonton, AB T6G 2G8, Canada.
Tetyana Segin , Department of Chemical and Materials Engineering , University of Alberta, Edmonton, AB T6G 2G8, Canada.
pp. 295

An Investigation of Femtosecond Laser Micromachining (Abstract)

Ming Xia , Department of Mechanical and Manufacturing Engineeringn, University of Calgary, Calgary, AB, Canada T2N 1N4
Yiliu Tu , Department of Mechanical and Manufacturing Engineeringn, University of Calgary, Calgary, AB, Canada T2N 1N4
pp. 296-300

Fabrication of The Multi-PCR Chamber With Inner Heat-Sink Materials Using a Micro-Blaster Etching Technique (Abstract)

Duk-Soo Eun , School of Electronic and Electrical Eng., Kyungpook National University, 1370 Sankyuk-dong, Buk-gu 702-701, Dae-gu, South Korea
Seong-Jin Kong , School of Electronic and Electrical Eng., Kyungpook National University, 1370 Sankyuk-dong, Buk-gu 702-701, Dae-gu, South Korea
Seong-Ho Kong , School of Electronic and Electrical Eng., Kyungpook National University, 1370 Sankyuk-dong, Buk-gu 702-701, Dae-gu, South Korea
Hyoung-Jin Park , School of Electronic and Electrical Eng., Kyungpook National University, 1370 Sankyuk-dong, Buk-gu 702-701, Dae-gu, South Korea
Jong-Hyun Lee , School of Electronic and Electrical Eng., Kyungpook National University, 1370 Sankyuk-dong, Buk-gu 702-701, Dae-gu, South Korea
Dae-Young Kong , School of Electronic and Electrical Eng., Kyungpook National University, 1370 Sankyuk-dong, Buk-gu 702-701, Dae-gu, South Korea
pp. 301-306
T3E: Applications in Micro and Nano Technologies I

Study on the Preparation and Electro-deformation of EVOH-SO3K IPMC (Abstract)

Yu-dong HUANG , Dept. of Applied Chemistry, Harbin Institute of Technology, Harbin 150001, China
Yu-jun ZHANG , Dept. of Applied Chemistry, Harbin Institute of Technology, Harbin 150001, China
Feng-fu LI , College of Material Science and Engineering, Harbin University of Science and Technology, Harbin, China
pp. 313-317

MEMS Accelerometer With Two Thin Film Piezoelectric Read-Out (Abstract)

SUN Bohua , Cape Peninsula University of Technology, Smart Structure and MEMS Lab, Cape Town, 7535,South Africa
ZHANG Rui , Cape Peninsula University of Technology, Smart Structure and MEMS Lab, Cape Town, 7535,South Africa
pp. 318

Analysis of Electroosmotic Flow with Linear Variable Zeta Potential (Abstract)

Zhang Peng , College of Mechanical Science and Engineering, Jilin University, Changchun 130025
Zhou Deyi , College of Mechanical Science and Engineering, Jilin University, Changchun 130025
Ji Feng , College of Mechanical Science and Engineering, Jilin University, Changchun 130025
Zuo Chuncheng , College of Mechanical Science and Engineering, Jilin University, Changchun 130025
pp. 319-326
W1: Plenary Speaker

RF MEMS for Low Power Wireless Communications (PDF)

Gabriel M. Rebeiz , Electrical and Computer Engineering The University of California, San Diego
pp. 327
W1A: Mathematical Directions in Micro and Nanoscale Science I

Switching time, impact velocity and release response, of voltage and charge driven electrostatic switches (Abstract)

David Elata , Technion - Israel Institute of Technology, Haifa 32000, Israel.
Vitaly Leus , Technion - Israel Institute of Technology, Haifa 32000, Israel.
pp. 331-334

Characterization and Analysis of Vertically Comb-driven Micromirrors (Abstract)

Hsing-Yi Chung , Department of Power Mechanical Engineering National Tsing Hua University Hsinchu 300, TAIWAN
Rongshun Chen , Department of Power Mechanical Engineering National Tsing Hua University Hsinchu 300, TAIWAN
pp. 335-340

Dynamic Deflection of Electrostatic MEMS (Abstract)

Yujin Guo , Department of Mathematics, University of British Columbia, Vancouver, B.C. Canada V6T 1Z2
Nassif Ghoussoub , Department of Mathematics, University of British Columbia, Vancouver, B.C. Canada V6T 1Z2
pp. 341-345

CYCLO-OLEFIN POLYMER DIRECT BONDING USING LOW TEMPERATURE PLASMA ACTIVATION BONDING (Abstract)

Thomas Glinsner , Nanotechnology Research Laboratory, Waseda University, Japan
Masanori Ishizuka , Department of Electrical Engineering and Bioscience Engineering, Waseda University, Japan
Sharon Farrens , EV Group, E. Thallner GmbH, Austria
Hidetoshi Shinohara , Department of Electrical Engineering and Bioscience Engineering, Waseda University, Japan
Shuichi Shoji , Department of Electrical Engineering and Bioscience Engineering, Waseda University, Japan
Takafumi Suzuki , Department of Electrical Engineering and Bioscience Engineering, Waseda University, Japan
Hiroyuki Ishida , EV Group Japan K.K., Japan
Viorel Dragoi , EV Group, E. Thallner GmbH, Austria
Jun Mizuno , Nanotechnology Research Laboratory, Waseda University, Japan
pp. 346-352
W1B: Space Applications of MEMS, Nano and Smart Systems

A method for crack detection in structures using piezoelectric sensors and actuators (Abstract)

Dan MATEESCU , Mechanical Engineering Department, McGill University, Montreal Quebec Canada
Arun K. MISRA , Mechanical Engineering Department, McGill University, Montreal Quebec Canada
Yong HAN , Mechanical Engineering Department, McGill University, Montreal Quebec Canada
pp. 353-354

The Use of Microelectromechanical Systems for Surge Detection in Gas Turbine Engines (Abstract)

Ion STIHARU , Micromechatronic Laboratory, CONCAVE Research Centre Department of Mechanical Engineering Concordia University, Montreal, Quebec
Muthukuruman PACKIRISAMY , Micromechatronic Laboratory, CONCAVE Research Centre Department of Mechanical Engineering Concordia University, Montreal, Quebec
Sergey ANDRONENKO , Micromechatronic Laboratory, CONCAVE Research Centre Department of Mechanical Engineering Concordia University, Montreal, Quebec
pp. 355-358

Multiplexed Fiber Bragg Gratings For Potential Aerospace Applications (Abstract)

Nezih Mrad , Air Vehicles Research Section, Defence R&D Canada, Department of National Defence, Government of Canada
Gao Zhi Xiao , Photonic Systems Group, National Research Council Canada, 1200 Montr?al Road, Bldg. M-50, Ottawa, ON. K1A 0R6, Canada
pp. 359-363

High-speed Dense Channel Fiber Bragg Grating Sensor Array For Structural Health Monitoring (Abstract)

L.K. Cheng , TNO Science and Industry, P.O. Box 155, 2600 AD Delft, The Netherlands
pp. 364-365
W1C: Carbon Nanotubes

Carbon Nanotube Elastomer Composites for use in Dielectric Polymer Actuators (Abstract)

Royale S. Underhill , Defence R&D Canada Atlantic
Brian W. Michalchuk , Defence R&D Canada Atlantic
pp. 369-370

Modeling of the Behavior of Random Carbon Nanotubes During Field Emission (Abstract)

Niraj Sinha , Department of Systems Design Engineering, University of Waterloo, Waterloo, ON, Canada N2L 3G1
John T. W. Yeow , Department of Systems Design Engineering, University of Waterloo, Waterloo, ON, Canada N2L 3G1
pp. 371-376

Flow-induced Vibration and Instability of Carbon Nanotubes (Abstract)

C.Q. Ru , Department of Mechanical Engineering, University of Alberta,Edmonton, Cananda T6G 2G8
J. Yoon , Department of Mechanical Engineering, University of Alberta,Edmonton, Cananda T6G 2G8
A. Mioduchowski , Department of Mechanical Engineering, University of Alberta,Edmonton, Cananda T6G 2G8
pp. 377-378

Modeling the Zinc Chelating Rosette Nanotube (Abstract)

Savariraj KINGSLEY , Department of Chemistry,University of Alberta, 9107-116 Str., Edmonton, AB, Canada T6G 2V4
Ross JOHNSON , Department of Chemistry,University of Alberta, 9107-116 Str., Edmonton, AB, Canada T6G 2V4
Andriy KOVALENKO , Department of Mechanical Engineering,University of Alberta, 9107-116 Str., Edmonton, AB, Canada T6G 2V4
Hicham FENNIRI , National Institute for Nanotechnology,University of Alberta, 9107-116 Str., Edmonton, AB, Canada T6G 2V4
Fuqiang BAN , National Institute for Nanotechnology,University of Alberta, 9107-116 Str., Edmonton, AB, Canada T6G 2V4
pp. 379-382
W2A: Mathematical Directions in Micro and Nanoscale Scienece II

A Variational Approach to Microneedle Design (Abstract)

P.A. Vasquez , University of Deleware Department of Mathematical Sciences Newark, DE, USA
J.A. Pelesko , University of Deleware Department of Mathematical Sciences Newark, DE, USA
pp. 383-386

Microneedle Arrays for Drug Delivery and Fluid Extraction (Abstract)

G.A. Jullien , ATIPS Laboratory, ECE, University of Calgary
P. Zhang , ATIPS Laboratory, ECE, University of Calgary
pp. 392-396
W2B: Micro and Nano Structures

III-V Compound Semiconductor Nanotechnology for Smart Systems (PDF)

Seiya Kasai , Research Center for Integrated Quantum Electronics, and Graduate School of Information Science and Technology, Hokkaido University, Sapporo, 060-8628 Japan
Hideki Hasegawa , Research Center for Integrated Quantum Electronics, and Graduate School of Information Science and Technology, Hokkaido University, Sapporo, 060-8628 Japan
pp. 399

A Self-Consistent Theory of Polymer Solvation (Abstract)

Lucian Livadaru , National Institute for Nanotechnology, National Research Council of Canada
Andriy Kovalenko , National Institute for Nanotechnology, National Research Council of Canada
pp. 400-401

Techniques For Biocells Sensing, Detection And Characterization (Abstract)

Wael Badawy , Department of Electrical and Computer Engineering University of Calgary, 2500 university drive, N.W, Alberta, T2N 1N4,Canada.
Yehya H. Ghallab , Department of Electrical and Computer Engineering University of Calgary, 2500 university drive, N.W, Alberta, T2N 1N4,Canada.
pp. 402-405

Microtubule Stability Studied by Integral Equation Theory (Abstract)

Andriy Kovalenko , University of Alberta and National Institute for Nanotechnology, Edmonton, AB, Canada
Piotr Drabik , University of Alberta and National Institute for Nanotechnology, Edmonton, AB, Canada
pp. 406-407
W2C: Applications in Micro and Nano Technologies II

Detection of Encephalic and Hemorrhagic Viruses: Integration of Micro and Nano-fabrication with Computational Tools (Abstract)

Maricel KANN , NLM, National Institutes of Health. USA
Roderic BERESFORD , Brown University. USA
Chistine D. KEATING , Pennsilvania State University. USA
Shana O. KELLEY , Boston College. USA
Willy VALDIVIA-GRANDA , Orion Integrated Biosciences, Inc. USA
pp. 411-417

Thermal Stability of IrO2 Nanowires (Abstract)

Sheng Teng Hsu , Sharp Labs of America, 5700 NW Pacific Rim Blvd. Camas, Washington 98607, USA
Robert Barrowcliff , Sharp Labs of America, 5700 NW Pacific Rim Blvd. Camas, Washington 98607, USA
Fengyan Zhang , Sharp Labs of America, 5700 NW Pacific Rim Blvd. Camas, Washington 98607, USA
pp. 418-420

Contact Mechanics Description of Inelastic Displacement Response of a Nano-Positioning Device (Abstract)

Robert W. Carpick , University of Wisconsin - Madison, Dept. of Engr. Physics, 1500 Engineering Drive, Madison, WI, 53706
Alex D. Corwina , Sandia National Laboratories, PO Box 5800, Albuquerque, NM, 87185-0847
Michael J. Starra , Sandia National Laboratories, PO Box 5800, Albuquerque, NM, 87185-0847
Erin E. Flater , University of Wisconsin - Madison, Dept. of Engr. Physics, 1500 Engineering Drive, Madison, WI, 53706
E. David Reedy, Jr , Sandia National Laboratories, PO Box 5800, Albuquerque, NM, 87185-0847
pp. 421-420

Nonlinear Vibration of Electrostatic MEMS under DC and AC Applied Voltage (Abstract)

Toshihiko SUGIURA , Department of Mechanical Engineering, Faculty of Science and Technology, Keio University Yokohama, Japan
Hikaru TAKAMATSU , Department of Mechanical Engineering, Faculty of Science and Technology, Keio University Yokohama, Japan
pp. 423-424
W3: Plenary Speaker

Self Assembly - Promises and Challenges (Abstract)

J.A. Pelesko , University of Deleware Department of Mathematical Sciences Newark, DE
pp. 427-428
W3A: MEMS Applications in Sensors and Actuators

A New Method of Electrostatic Force Modeling for MEMS Sensors and Actuators (Abstract)

Sazzadur Chowdhury , Department of Electrical and Computer Engineering University of Windsor Windsor, Ontario, N9B 3P4 Canada
M. Ahmadi , Department of Electrical and Computer Engineering University of Windsor Windsor, Ontario, N9B 3P4 Canada
W. C. Miller , Department of Electrical and Computer Engineering University of Windsor Windsor, Ontario, N9B 3P4 Canada
pp. 431-435

Design of a Thermal-Bubble-Based Micromachined Accelerometer (Abstract)

Ke-Min Liao , Department of Power Mechanical Engineering, National Tsing Hua University,Hsinchu, Taiwan, R.O.C.
Bruce C. S. Chou , LighTuning Technology Inc., Hsinchu, Taiwan, R.O.C.
Rongshun Chen , Department of Power Mechanical Engineering, National Tsing Hua University,Hsinchu, Taiwan, R.O.C.
pp. 438-442

A Study on the Effects of Humidity, Temperature, and Pressure Sensor on the Piezoresistive Film Co-Structure (Abstract)

Lu-Ping Chao , Professor, Department of Mechanical and Computer Aided Engineering, Feng Chia University,Taichung, Taiwan, R.O.C.
Chih-Wei Lin , Graduate Institute of Mechanical Engineering, Feng Chia University, Taichung, Taiwan, R.O.C.
Yung-Dong Lau , Department of Mechanical and Computer Aided Engineering, Feng Chia University, Taichung,Taiwan, R.O.C.
pp. 443-447
W3B: Micro Resonators

Pulse-actuated micromechanical resonator using digital Kalman observer (Abstract)

J?r?me Juillard , Sup?lec, Gif-sur-Yvette, France
Dimitri Galayko , Sup?lec, Gif-sur-Yvette, France
Eric Colinet , Sup?lec, Gif-sur-Yvette, France
pp. 449-453

Verifying Finite Element Simulation for a Piezoresistive MEMS Sensor (Abstract)

W. Moussa , University of Alberta
D. Benfield , University of Alberta
E. Lou , Glenrose Rehabilitation Hosp.
pp. 454
W3C: Microsystems Dynamics

Versatile Inertial Displacement Sensor for Planar Motion (Abstract)

Swavik A. SPIEWAK , University of Calgary, Calgary, AB, Canada
pp. 463-466

The Implementation of Fuzzy-Based Path Planning for Car-Like Mobile Robot (Abstract)

Hung-Ching Lu , Department of Electrical Engineering,Tatung University,Taipei, 104, Taiwan
Chih-Ying Chuang , Department of Electrical Engineering,Tatung University,Taipei, 104, Taiwan
pp. 467-472

Expert System Suitability in Modeling and Analysis of Tool Wear in Drilling (Abstract)

P.S. Sivarao , Manufacturing Faculty, National Technical University College of Malaysia
pp. 473-476
Author Index

Author Index (PDF)

pp. 477
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