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MEMS, NANO, and Smart Systems, International Conference on (2005)
Banff, Alberta, Canada
July 24, 2005 to July 27, 2005
ISBN: 0-7695-2398-6
pp: 81-86
Mihai Patrascu , Univ. of Twente, The Netherlands Control Engineering Laboratory
Stefano Stramigioli , Univ. of Twente, The Netherlands Control Engineering Laboratory
ABSTRACT
<p>This paper is about the ?Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7mN for ranges as large as 140?m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the ?Walker. Several methods to obtain displacements smaller than one nominal step ( 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.</p>
INDEX TERMS
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CITATION

S. Stramigioli and M. Patrascu, "Stick-slip Actuation of Electrostatic Stepper Micropositioners for Data Storage - the ?Walker," MEMS, NANO, and Smart Systems, International Conference on(ICMENS), Banff, Alberta, Canada, 2005, pp. 81-86.
doi:10.1109/ICMENS.2005.112
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