The Community for Technology Leaders
Electronic Design, Test and Applications, IEEE International Workshop on (2011)
Queenstown, New Zealand
Jan. 17, 2011 to Jan. 19, 2011
ISBN: 978-0-7695-4306-2
pp: 189-194
ABSTRACT
To stay competitive, semiconductor manufacturers have come to acknowledge maintenance as an essential strategic element in manufacturing process planning. Condition-based maintenance (CBM) allows the maintenance strategy to be customised based on the equipment type and its failure pattern. Traditional CBM uses simple control charts, thus limiting its application to simple systems. This paper proposes the use of Data-driven CBM as a maintenance strategy for equipment in a semiconductor mass production environment.
INDEX TERMS
test equipment, condition monitoring, failure analysis, maintenance engineering, mass production, materials handling equipment, process planning, semiconductor industry, strategic planning, mass production, data-driven condition-based maintenance, test handlers, semiconductor manufacturing, CBM strategy, manufacturing process planning, equipment failure pattern, Control charts, Manufacturing, Condition monitoring, Reliability, Integrated circuits, control chart, semiconductor manufacturing, condition based maintenance, test handler
CITATION

"Data-Driven Condition-Based Maintenance of Test Handlers in Semiconductor Manufacturing," 2011 IEEE 6th International Workshop on Electronic Design, Test and Application (DELTA 2011)(DELTA), Queenstown, 2011, pp. 189-194.
doi:10.1109/DELTA.2011.42
83 ms
(Ver 3.3 (11022016))