Electronic Design, Test and Applications, IEEE International Workshop on (2002)
Christchurch, New Zealand
Jan. 29, 2002 to Jan. 31, 2002
Ranjit Singh , Singapore Polytechnic
Low Lee Ngo , Singapore Polytechnic
Ho Soon Seng , Singapore Polytechnic
Frederick Neo Chwee Mok , Singapore Polytechnic
The paper describes the design, simulation and fabrication of a silicon pressure sensor. The device makes use a of monocrystaline silicon square diaphragm supported by a thick silicon rim. The diaphragm is fabricated by etching away the bulk silicon on a defined region until the required thickness is achieved. The sensor makes use of four piezoresistors diffused into the surface of a diaphragm close to the edges. The piezoresistors are arranged in the Wheatstone bridge configuration to achieve higher voltage sensitivity and low temperature sensitivity. The sensor has been designed and simulated using COVENTER and ANSYS software tools. The paper also discuss the results obtained from the simulations and the response from the fabricated sensor.
H. S. Seng, R. Singh, F. N. Mok and L. L. Ngo, "A Silicon Piezoresistive Pressure Sensor," Electronic Design, Test and Applications, IEEE International Workshop on(DELTA), Christchurch, New Zealand, 2002, pp. 181.