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Design Automation Conference (2000)
Los Angeles, CA
June 5, 2000 to June 9, 2000
ISBN: 1-58113-1897-9
pp: 671-674
Gabriel Robins , University of Virginia, Charlottesville, VA
Andrew B. Kahng , UCLA Computer Science Dept., Los Angeles, CA
Yu Chen , UCLA Computer Science Dept., Los Angeles, CA
Alexander Zelikovsky , Georgia State University, Atlanta, GA
ABSTRACT
We propose practical iterated methods for layout density control for CMP uniformity, based on linear programming, Monte-Carlo and greedy algorithms. We experimentally study the tradeoffs between two main filling objectives: minimizing density variation, and minimizing the total amount of inserted fill. Comparisons with previous filling methods show the advantages of our new iterated Monte-Carlo and iterated greedy methods. We achieve near-optimal filling with respect to each of the objectives and for both density models (spatial density [3] and effective density [8]). Our new methods are more efficient in practice than linear programming [3] and more accurate than non-iterated Monte-Carlo approaches [1].
INDEX TERMS
ASIC, clock frequency, clock speed, comparison, custom
CITATION
Gabriel Robins, Andrew B. Kahng, Yu Chen, Alexander Zelikovsky, "Practical Iterated Fill Synthesis for CMP Uniformity", Design Automation Conference, vol. 00, no. , pp. 671-674, 2000, doi:10.1109/DAC.2000.855399
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