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Design Automation Conference (2000)
Los Angeles, CA
June 5, 2000 to June 9, 2000
ISBN: 1-58113-1897-9
pp: 671-674
Gabriel Robins , University of Virginia, Charlottesville, VA
Andrew B. Kahng , UCLA Computer Science Dept., Los Angeles, CA
Yu Chen , UCLA Computer Science Dept., Los Angeles, CA
Alexander Zelikovsky , Georgia State University, Atlanta, GA
We propose practical iterated methods for layout density control for CMP uniformity, based on linear programming, Monte-Carlo and greedy algorithms. We experimentally study the tradeoffs between two main filling objectives: minimizing density variation, and minimizing the total amount of inserted fill. Comparisons with previous filling methods show the advantages of our new iterated Monte-Carlo and iterated greedy methods. We achieve near-optimal filling with respect to each of the objectives and for both density models (spatial density [3] and effective density [8]). Our new methods are more efficient in practice than linear programming [3] and more accurate than non-iterated Monte-Carlo approaches [1].
ASIC, clock frequency, clock speed, comparison, custom
Gabriel Robins, Andrew B. Kahng, Yu Chen, Alexander Zelikovsky, "Practical Iterated Fill Synthesis for CMP Uniformity", Design Automation Conference, vol. 00, no. , pp. 671-674, 2000, doi:10.1109/DAC.2000.855399
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