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Issue No. 01 - Jan.-Feb. (2013 vol. 33)
ISSN: 0272-1732
pp: 32-40
Chia-Ming Chang , Stanford University
Olav Solgaard , Stanford University
ABSTRACT
A methodology allows fabrication of silicon-photonic devices in standard silicon wafers, eliminating the need for silicon-on-insulator (SOI) wafers. Using this technology, the authors demonstrate low-loss silicon waveguides (2.34 dB/cm), comparable to conventional SOI channel waveguides. The ease and flexibility of this fabrication method simplify integration of electronics and photonics and make it a possible alternative to SOI-based technology for implementation of silicon-photonic devices and systems.
INDEX TERMS
Optical waveguides, Silicon, Annealing, Photonics, Waveguide components, Optical interconnections, Substrates, Photonic devices, waveguides, silicon photonics, optical interconnects, integrated optics devices
CITATION

O. Solgaard and C. Chang, "Monolithic Silicon Waveguides in Standard Silicon," in IEEE Micro, vol. 33, no. , pp. 32-40, 2013.
doi:10.1109/MM.2012.93
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