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Issue No. 02 - March/April (2010 vol. 30)
ISSN: 0272-1732
pp: 80-89
Sassan Tabatabaei , SiTime Corporation
Aaron Partridge , SiTime Corporation
<p>Recent advances in microelectromechanical system (MEMS) manufacturing and circuit design techniques have propelled MEMS-based silicon oscillators into the mainstream of electronic components. This article discusses the reasons for this trend, which include size, reliability, mass manufacturability, and performance advantages in various digital applications, such as processors and parallel and serial interfaces.</p>
hardware, silicon oscillator, microelectromechanical systems, MEMS resonator, MEMS packaging, oscillator, clock, digital clocking, serial interfaces

A. Partridge and S. Tabatabaei, "Silicon MEMS Oscillators for High-Speed Digital Systems," in IEEE Micro, vol. 30, no. , pp. 80-89, 2010.
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