The Community for Technology Leaders
RSS Icon
Issue No.02 - March/April (2010 vol.30)
pp: 80-89
Sassan Tabatabaei , SiTime Corporation
Aaron Partridge , SiTime Corporation
<p>Recent advances in microelectromechanical system (MEMS) manufacturing and circuit design techniques have propelled MEMS-based silicon oscillators into the mainstream of electronic components. This article discusses the reasons for this trend, which include size, reliability, mass manufacturability, and performance advantages in various digital applications, such as processors and parallel and serial interfaces.</p>
hardware, silicon oscillator, microelectromechanical systems, MEMS resonator, MEMS packaging, oscillator, clock, digital clocking, serial interfaces
Sassan Tabatabaei, Aaron Partridge, "Silicon MEMS Oscillators for High-Speed Digital Systems", IEEE Micro, vol.30, no. 2, pp. 80-89, March/April 2010, doi:10.1109/MM.2010.39
1. H.C. Nathanson et al, "The Resonant Gate Transistor," IEEE Trans. Electronic Devices, vol. 14, no. 3, 1967, pp. 117-133.
2. R.J. Wilfinger, P.H. Bardell, and D.S. Chhabra, "The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon Substrate," IBM J. Research and Development, vol. 12, 1968, p. 113.
3. SiTime's MEMS First Process, SiTime application note AN20001, SiTime Corp.; .
4. A. Partridge and J. McDonald, MEMS to Replace Quartz Oscillators as Frequency Sources, NASA technical brief, vol. 30, no. 6, 2006.
5. A. Partridge et al., "New Thin Film Epitaxial Polysilicon Encapsulation for Piezoresistive Accelerometers," Proc. 14th Int'l Conf. Microelectromechanical Systems, IEEE Press, 2001, pp. 54-59.
6. Xilinx Corp., ML605 Hardware User Guide, UG534 (v1.2.1), Jan. 2010; boards_and_kitsug534.pdf.
7. C. Nguyen, "MEMS Technology for Timing and Frequency Control," IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control, vol. 54, no. 2, 2007, pp. 251-270.
8. J.C. Salvia et al., "Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop," J. Microelectromechanical Systems, vol. 19, no. 1, 2010, pp. 192-201.
9. M.P. Li, Jitter, Noise, and Signal Integrity at High-Speed, chap. 3, Prentice Hall, 2008.
10. JESD79-2E: DDR2 SDRAM Specification, JEDEC Solid State Technology Assoc., Apr. 2008.
11. Fiber Channel Methodologies for Jitter and Signal Quality Specification (MJSQ), T11.2/project 1316-DT/rev 10.0, Nat'l Committee Information Technology Standardization (NCITS), Mar. 2003.
12. PCI Express Base Specification Revision 2.0, PCI Special Interest Group, 20 Dec. 2006.
13. SiT8102 High Performance Oscillator Datasheets, SiTime Corp.
17 ms
(Ver 2.0)

Marketing Automation Platform Marketing Automation Tool