# Micro News

Pages: p. 6

## CHIP MANUFACTURERS SPENDING MORE ON R&D

To cash in on their new markets, chip makers are spending on research and development as never before. According to the National Science Foundation, spending on chip R&D jumped 45 percent from 1998 to 2001, reaching $14.2 million, and it continues to rise. Intel announced it will spend$4.8 billion this year on R&D, up 10 percent from 2003 and the largest one year increase in its 35-year history.

## RESEARCHERS DEVELOP IMAGE RESOLUTION TECHNOLOGY

A team of researchers at Rochester Institute of Technology has developed the ability to use optical microlithography to produce semiconductor device geometry as small as 38 nm. The team, led by Bruce Smith, Intel Professor of Microelectronic Engineering and associate dean of the Kate Gleason College of Engineering, used a prototype liquid immersion nanolithography tool developed at RIT.

Smith says researchers can now use optics and light much closer to the ultraviolet range to produce microelectronic devices that previously required extreme ultraviolet or near x-ray wavelengths. This allows for more rapid and cost-effective development of small, powerful, and affordable microelectronic devices.

The process is an enhanced method of creating circuit patterns on computer chips by exposing a light-sensitive layer, called photoresist, through a layer of water rather than through air.

## Correction

In the article, "Transactional Execution: Toward Reliable, High-Performance Multithreading" (Nov.-Dec. IEEE Micro), there is an error in Figure 2 (p. 122). In these graphs, the squares represent MCS values, and the diamonds represent Base values.

IEEE Micro regrets this arror.