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We describe First AID, an information-client-based system that is used for remote fault diagnosis of LEO scanning electron microscopes. Such a system requires SEM diagnostic expertise to be combined with remotely obtained information. We summarize design and implementation issues, describing the software for remote instrument control and the technical details of integrating an expert system and a Web browser. Finally we examine the additional changes to expert system functionality required by such a coupling as well as other remote diagnostic support issues. We walk through a sample consultation to illustrate remote diagnosis and conclude with the system's status and future plans.
expert systems, Internet, Web, scanning electron microscopy, remote diagnosis

N. H. Caldwell, B. C. Breton and D. M. Holburn, "Remote Instrument Diagnosis on the Internet," in IEEE Intelligent Systems, vol. 13, no. , pp. 70-76, 1998.
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