The Community for Technology Leaders
Green Image
Issue No. 04 - July/August (2007 vol. 24)
ISSN: 0740-7475
pp: 352-361
Federico Di Palma , University of Pavia
Guido Miraglia , STMicroelectronics
Giuseppe De Nicolao , University of Pavia
Oliver M. Donzelli , STMicroelectronics
Process diagnosis is critical to the semiconductor industry. Early detection of faulty process steps can dramatically reduce business losses and accelerate the development cycle of new products. This article proposes a novel methodology called AC/ID (automatic classification/interactive diagnosis) that can isolate the root causes of yield loss by combining end-of-line tests (such as wafer sort test) with process history information. The authors have automated the AC/ID methodology in a software tool, ACID (Automatic Classification for Interactive Design), which is fully operational at industrial production sites.
AC/ID methodology, semiconductor manufacturing, fault diagnosis, electrical sort test, commonality analysis, pattern recognition, statistical methods
Federico Di Palma, Guido Miraglia, Giuseppe De Nicolao, Oliver M. Donzelli, "ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis", IEEE Design & Test of Computers, vol. 24, no. , pp. 352-361, July/August 2007, doi:10.1109/MDT.2007.119
89 ms
(Ver 3.3 (11022016))