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This article investigates the response and survivability of microelectromechanical systems (MEMS) "low-g" capacitive accelerometers to high-g shock levels. We evaluated three different capacitive accelerometers: Silicon Designs, Inc. (SDI) 1220 accelerometer, Analog Devices (AD) ADXL 181-1000 accelerometer, and Endevco 7290A-100 accelerometer. We chose these devices due to their differing maximum g sensing levels (MGSL). The SDI devices survived to 70 kgn, whereas the AD and Endevco devices survived to 60 kgn and 30 kgn, respectively. Each device possessed a time delay or lag in response to the applied shock when compared to a reference accelerometer. The devices were each evaluated above and below their MGSL to determine their linearity, response times, lag times, pulse duration, survivability levels, and failure modes.
Scott L. Roberson, Alain Béliveau, Keith A. Thomas, Guy T. Spencer, "Evaluation of MEMS Capacitive Accelerometers", IEEE Design & Test of Computers, vol. 16, no. , pp. 48-56, October-December 1999, doi:10.1109/54.808209
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