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Issue No. 04 - October-December (1997 vol. 14)
ISSN: 0740-7475
pp: 78-86
The accuracy of electron-beam waveform measurements is discussed, and the source of several potential measurement errors is described. The importance of testing for such errors is emphasized. Examples of detectable errors in waveform amplitude, waveform noise, and time resolution, are presented and discussed. Where appropriate, methods of avoiding such errors are described.
electron-beam probing, e-beam testing, measurement errors, VLSI, internal signals, internal waveforms
Keith A. Jenkins, "Detecting and Preventing Measurement Errors", IEEE Design & Test of Computers, vol. 14, no. , pp. 78-86, October-December 1997, doi:10.1109/54.632884
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