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Issue No. 01 - January (1980 vol. 13)
ISSN: 0018-9162
pp: 8-13
J. Hayes , Synertek
ABSTRACT
Basic MOS feature dimensions may fall to the 0.5?m level by the mid-1980's. Such scaling will create new challenges related to registration accuracy, dimensional control, and defect density.
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CITATION
J. Hayes, "MOS Scaling", Computer, vol. 13, no. , pp. 8-13, January 1980, doi:10.1109/MC.1980.1653335
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