Issue No. 01 - January (1980 vol. 13)
J. Hayes , Synertek
Basic MOS feature dimensions may fall to the 0.5?m level by the mid-1980's. Such scaling will create new challenges related to registration accuracy, dimensional control, and defect density.
J. Hayes, "MOS Scaling", Computer, vol. 13, no. , pp. 8-13, January 1980, doi:10.1109/MC.1980.1653335