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Monolithic Silicon Waveguides in Standard Silicon
Found in: IEEE Micro
By Chia-Ming Chang,Olav Solgaard
Issue Date:January 2013
pp. 32-40
A methodology allows fabrication of silicon-photonic devices in standard silicon wafers, eliminating the need for silicon-on-insulator (SOI) wafers. Using this technology, the authors demonstrate low-loss silicon waveguides (2.34 dB/cm), comparable to conv...
 
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