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23rd IEEE VLSI Test Symposium (VTS'05)
On-Chip Electro-Thermal Stimulus Generation for a MEMS-Based Magnetic Field Sensor
Palm Springs, California
May 01-May 05
ISBN: 0-7695-2314-5
N. Dumas, Universite Montpellier II/CNRS
F. Aza?, Universite Montpellier II/CNRS
L. Latorre, Universite Montpellier II/CNRS
P. Nouet, Universite Montpellier II/CNRS
This paper introduces some practical BIST solutions as a basis for a future self-testable MEMS-based magnetic field sensor. It is demonstrated that slight modifications of the system architecture can be used to allow both on-chip generation of electro-thermal stimuli and pre-processing of the sensor response. The external response analysis and thus the test procedure are then strongly simplified and require only a standard digital automatic test equipment.
Citation:
N. Dumas, F. Aza?, L. Latorre, P. Nouet, "On-Chip Electro-Thermal Stimulus Generation for a MEMS-Based Magnetic Field Sensor," vts, pp.213-218, 23rd IEEE VLSI Test Symposium (VTS'05), 2005
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