Cantilever Type Probe Card for At-Speed Memory Test on Wafer

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23rd IEEE VLSI Test Symposium (VTS'05)

Palm Springs, California

May 01-May 05

ISBN: 0-7695-2314-5

	ASCII Text	x
	Hitoshi Iwai, Atsushi Nakayama, Naoko Itoga, Kotaro Omata, "Cantilever Type Probe Card for At-Speed Memory Test on Wafer," VLSI Test Symposium, IEEE, pp. 85-89, 23rd IEEE VLSI Test Symposium (VTS'05), 2005.

	BibTex	x
	@article{ 10.1109/VTS.2005.34, author = {Hitoshi Iwai and Atsushi Nakayama and Naoko Itoga and Kotaro Omata}, title = {Cantilever Type Probe Card for At-Speed Memory Test on Wafer}, journal ={VLSI Test Symposium, IEEE}, volume = {0}, year = {2005}, issn = {1093-0167}, pages = {85-89}, doi = {http://doi.ieeecomputersociety.org/10.1109/VTS.2005.34}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, }

	RefWorks Procite/RefMan/Endnote	x
	TY - CONF JO - VLSI Test Symposium, IEEE TI - Cantilever Type Probe Card for At-Speed Memory Test on Wafer SN - 1093-0167 SP85 EP89 A1 - Hitoshi Iwai, A1 - Atsushi Nakayama, A1 - Naoko Itoga, A1 - Kotaro Omata, PY - 2005 KW - Probe Card KW - At-Speed KW - Memory KW - On Wafer KW - Test VL - 0 JA - VLSI Test Symposium, IEEE ER -

Hitoshi Iwai, Toshiba Corporation Semiconductor Company

Atsushi Nakayama, Toshiba Corporation Semiconductor Company

Naoko Itoga, Toshiba Corporation Semiconductor Company

Kotaro Omata, Apex Inc.

DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/VTS.2005.34

In this paper, we present a new low cost probe card, which enables high speed (500MHz) memory test on wafer. Since it is difficult to characterize memory devices on wafer at high speed with a low cost probe card, then high speed memory test is usually conducted after assembling packages, although package test requires long lead time for test. We have tested Embedded DRAM at 500MHz on wafer with the new probe card which has Cantilever needles. The results show that the probe card can be used for memory at-speed test up to 500MHz.

Index Terms:

Probe Card, At-Speed, Memory, On Wafer, Test

Citation:

Hitoshi Iwai, Atsushi Nakayama, Naoko Itoga, Kotaro Omata, "Cantilever Type Probe Card for At-Speed Memory Test on Wafer," vts, pp.85-89, 23rd IEEE VLSI Test Symposium (VTS'05), 2005

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