Evaluation of the Oscillation-based Test Methodology for Micro-Electro-Mechanical Systems

V
VTS
2002
20th IEEE VLSI Test Symposium
Abstract - Evaluation of the Oscillation-based Test Methodology for Micro-Electro-Mechanical Systems

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20th IEEE VLSI Test Symposium

Monterey, California

April 28-May 02

ISBN: 0-7695-1570-3

	ASCII Text	x
	V. Beroulle, Y. Bertrand, L. Latorre, P. Nouet, "Evaluation of the Oscillation-based Test Methodology for Micro-Electro-Mechanical Systems," VLSI Test Symposium, IEEE, pp. 0439, 20th IEEE VLSI Test Symposium, 2002.

	BibTex	x
	@article{ 10.1109/VTS.2002.1011177, author = {V. Beroulle and Y. Bertrand and L. Latorre and P. Nouet}, title = {Evaluation of the Oscillation-based Test Methodology for Micro-Electro-Mechanical Systems}, journal ={VLSI Test Symposium, IEEE}, volume = {0}, year = {2002}, isbn = {0-7695-1570-3}, pages = {0439}, doi = {http://doi.ieeecomputersociety.org/10.1109/VTS.2002.1011177}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, }

	RefWorks Procite/RefMan/Endnote	x
	TY - CONF JO - VLSI Test Symposium, IEEE TI - Evaluation of the Oscillation-based Test Methodology for Micro-Electro-Mechanical Systems SN - 0-7695-1570-3 SP EP A1 - V. Beroulle, A1 - Y. Bertrand, A1 - L. Latorre, A1 - P. Nouet, PY - 2002 VL - 0 JA - VLSI Test Symposium, IEEE ER -

V. Beroulle, Laboratoire d ?Informatique de Robotique et de Micro?lectronique de Montpellier

Y. Bertrand, Laboratoire d ?Informatique de Robotique et de Micro?lectronique de Montpellier

L. Latorre, Laboratoire d ?Informatique de Robotique et de Micro?lectronique de Montpellier

P. Nouet, Laboratoire d ?Informatique de Robotique et de Micro?lectronique de Montpellier

DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/VTS.2002.1011177

In this paper, the Oscillation-based Test Methodology (OTM) is evaluated in the context of MEMS testing. Both qualitative and quantitative evaluations of fault coverage are discussed and the impact of test on productio yield is addressed. This article also introduces the Lorentz force as a low-cost stimulus for electro-mechanical structures.

Citation:

V. Beroulle, Y. Bertrand, L. Latorre, P. Nouet, "Evaluation of the Oscillation-based Test Methodology for Micro-Electro-Mechanical Systems," vts, pp.0439, 20th IEEE VLSI Test Symposium, 2002

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