We report on a new type of micromachined probe card which utilizes fritting process to make contact to Al or Cu pads with low contact force smaller than 10 mN. Microcantilevers contacting the pad surface with buckling deformation and can keep uniform contact force were designed and fabricated. Mechanical properties of the micro-cantilever was measured and a good agreement with theoretical buckling force was obtained. Fritting characteristics of the microcantilevers were measured using electrolyte condencer as the power source. It was found that current duration of several milliseconds is enough to cause fritting. The contact resistance of the probe card was measured to be less than 1 Ω with contact force of 3 mN. Using an atomic force microscopy, probe marks made on the Cu electrode were measured to be 100 nm in depth and 15 ?m in width, when the contact force was 10 mN.