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2006 IEEE International Conference on Robotics and Biomimetics
Gecko inspired Electrostatic Chuck
Kunming, China
December 17-December 20
ISBN: 1-4244-0570-X
Jose Berengueres, Department of International Development Engineering, Tokyo Institute of Technology, Tokyo, Japan. jo
Masataka Urago, Department of International Development Engineering, Tokyo Institute of Technology, Tokyo, Japan. mu
Shigeki Saito, Department of Mechanical and Aerospace Engineering, Tokyo Institute of Technology, Tokyo, Japan. sai
Kenjiro Tadakuma, Department of Mechanical and Aerospace Engineering, Tokyo Institute of Technology, Tokyo, Japan. tad
Hiroyuki Meguro, Department of Mechanical and Aerospace Engineering, Tokyo Institute of Technology, Tokyo, Japan. meg
We introduce a climbing system, inspired by gecko foot that uses Electrostatic Chuck (ESC) in place of Van der Waals interaction. Electrostatic chucks are currently used in wafer foundries to pick-up and move delicate thin semiconductor wafers. The properties of ESC make it an interesting adhesion force for wall mobility applications. However the great dependency of current ESCs' adhesion force on the surface roughness of the substrate renders them ineffective in "normal-roughness" walls. By combining ESC adhesion with gecko's foot-hair surface-roughness adaptability function we propose a device for wall mobility applications.
Citation:
Jose Berengueres, Masataka Urago, Shigeki Saito, Kenjiro Tadakuma, Hiroyuki Meguro, "Gecko inspired Electrostatic Chuck," robio, pp.1018-1023, 2006 IEEE International Conference on Robotics and Biomimetics, 2006
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