Semiconductor yield has traditionally been limited by random particle-defect based issues.However, as the feature sizes reduced to 0.13 micron and below, systematic mechanism-limited yield loss began to appear as a substantial component in yield loss. In addition, it is becoming clear that ramping yield would take longer and final yields would not reach historical norms.
Citation:
Srikanth Venkataraman, "DFM, DFY, Debug and Diagnosis: The Loop to Ensure Yield," isqed, pp.5, 8th International Symposium on Quality Electronic Design (ISQED'07), 2007