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8th International Symposium on Quality Electronic Design (ISQED'07)
Design-for-Manufacture for Multi Gate Oxide CMOS Process
San Jose, California
March 26-March 28
ISBN: 0-7695-2795-7
Qi Lin, Xilinx Inc., USA
Mei Ma, Xilinx Inc., USA
Tony Vo, Xilinx Inc., USA
Jenny Fan, Xilinx Inc., USA
Xin Wu, Xilinx Inc., USA
Richard Li, Xilinx Inc., USA
Xiao-Yu Li, Xilinx Inc., USA
Most of DFM emphasis has been placed on those so called "lithography critical layers" like diffusion, poly, contact and metal layers. However, "non-lithography-critical layers" impact on the manufacture and the yield has not been investigated well. This paper addresses the DFM issue for one of "non-lithography-critical layers", i.e. thick gate oxide layout in dual oxide product, which in this case impacts the product yield significantly. In this paper, a yield loss in a dual oxide FPGA product is analyzed, and the root cause is demonstrated and finally the DFM approaches for gate oxide design and layout are proposed.
Index Terms:
DFM, FPGA, multi gate oxide, layout, yield.
Citation:
Qi Lin, Mei Ma, Tony Vo, Jenny Fan, Xin Wu, Richard Li, Xiao-Yu Li, "Design-for-Manufacture for Multi Gate Oxide CMOS Process," isqed, pp.339-343, 8th International Symposium on Quality Electronic Design (ISQED'07), 2007
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