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Sixth International Symposium on Quality of Electronic Design (ISQED'05)
Reticle Floorplanning and Wafer Dicing for Multiple Project Wafers
San Jose, California
March 21-March 23
ISBN: 0-7695-2301-3
Meng-Chiou Wu, Yuan Ze University, Taiwan
Rung-Bin Lin, Yuan Ze University, Taiwan
Multi-project wafer having several chips placed on the same reticle to lower mask cost is key to low-volume IC fabrication. In this paper, we proposed two MILP models for simultaneous reticle floorplanning and wafer dicing problem, a formulation for rectile floorplanning problem which either deals with a pre-selected reticle size or incorporates reticle size optimization into a floorplanning process, and two ILP models and a simulated annealing implementation for wafer dicing. Production volume requirement and chip replication are considered in reticle floorplanning to enhance dicing yield. Although our methods take longer time to produce a floorplan, the floorplan results in better dicing yield than that obtained by previous work.
Citation:
Meng-Chiou Wu, Rung-Bin Lin, "Reticle Floorplanning and Wafer Dicing for Multiple Project Wafers," isqed, pp.610-615, Sixth International Symposium on Quality of Electronic Design (ISQED'05), 2005
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