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Sixth International Symposium on Quality of Electronic Design (ISQED'05)
San Jose, California
March 21-March 23
ISBN: 0-7695-2301-3
Ashok K. Sinha, Applied Materials, Inc
Citation:
Ashok K. Sinha, "Recent Progress and Remaining Challenges in Pattern Transfer Technologies for Advanced Chip Designs," isqed, pp.17-17, Sixth International Symposium on Quality of Electronic Design (ISQED'05), 2005
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