With ever-shrinking process technology, there is significant concern about the effects of process variability on design margins, yield, and performance. In addition, reliability is a major concern with new technology, not only through classic means such as latent defects and NBTI, but also by new issues brought on by variability, small feature sizes, and power-saving features such as dynamic supply voltage scaling. This paper shows how process scaling will affect reliability and how this interacts with ECC and redundancy features.