The 14th International Conference on VLSI Design (VLSID '01) Effect Of Fringing Capacitances In Sub 100 Nm Mosfet's With High-K Gate Dielectrics Bangalore, India January 03-January 07 ISBN: 0-7695-0831-6
In this paper we look at the quantitative picture of fringing field effects by use of high-k dielectrics on the 70 nm node CMOS technologies. By using Monte-Carlo based techniques, we extract the degradation in gate-to-channel capacitance and the internal, external fringing capacitance components for varying values of K. Our results clearly show the decrease in external fringing capacitance, increase in internal fringing capacitance and a slight decrease in overall capacitance, when the conventional SiO2 is replaced by high-K dielectric. From the circuit point of view the lower total capacitance will increase the speed of the device, while the internal fringing capacitance will degrade the short-channel performance contributing to higher DIBL and drain leakage.
Citation:
Nihar. R. Mohapatra, A. Dutta, M.P. Desai, V. Ramgopal Rao, "Effect Of Fringing Capacitances In Sub 100 Nm Mosfet's With High-K Gate Dielectrics," vlsid, pp.479, The 14th International Conference on VLSI Design (VLSID '01), 2001 Usage of this product signifies your acceptance of the Terms of Use. | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||