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2005 International Conference on MEMS,NANO and Smart Systems
Performance of a 512x3 Pixel Microbolometer Detector for Space Imaging Applications
Banff, Alberta, Canada
July 24-July 27
ISBN: 0-7695-2398-6
T.D. Pope, INO, 2740 Einstein, Sainte-Foy, Qu?bec, Canada G1P 4S4
C. Alain, INO, 2740 Einstein, Sainte-Foy, Qu?bec, Canada G1P 4S4
L. Le Noc, INO, 2740 Einstein, Sainte-Foy, Qu?bec, Canada G1P 4S4
H. Jerominek, INO, 2740 Einstein, Sainte-Foy, Qu?bec, Canada G1P 4S4
L. Ngo Phong, CSA, 6767 route de l'A?roport, Saint-Hubert, Qu?bec, Canada J3Y 8Y9
W. Zheng, CSA, 6767 route de l'A?roport, Saint-Hubert, Qu?bec, Canada J3Y 8Y9

A 512x3 pixel microbolometer detector array has been developed for space imaging applications. Each pixel includes thermally sensitive and reference microbolometer detectors fabricated by surface micromachining and arranged in a Wheatstone bridge configuration. The detector array is sensitive to thermal infrared radiation and early characterisation shows good uniformity of response between the three lines and among pixels in a given line. The pixel bridge configuration reduces the impact of die temperature drift on pixel output to approximately 40 ?V/K, a three hundred fold improvement over a single microbolometer detector.

Citation:
T.D. Pope, C. Alain, L. Le Noc, H. Jerominek, L. Ngo Phong, W. Zheng, "Performance of a 512x3 Pixel Microbolometer Detector for Space Imaging Applications," icmens, pp.275-276, 2005 International Conference on MEMS,NANO and Smart Systems, 2005
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