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2005 International Conference on MEMS,NANO and Smart Systems
Next Generation Microbolometers for High Resolution Remote Sensing
Banff, Alberta, Canada
July 24-July 27
ISBN: 0-7695-2398-6
L. Ngo Phong, Canadian Space Agence, Canada
J. Lee, Canadian Space Agence, Canada
W. Zheng, Canadian Space Agence, Canada
T. D. Pope, INO, Canada
C. Alain, INO, Canada
S. Elias, INO, Canada
H. Jerominek, INO, Canada

We describe our recent work on improving the time constant and NETD of uncooled microbolometer detector. Such improvement would enable infrared remote sensing with a spatial resolution better than 150 m from low earth orbits. Radiometric simulation of the new microbolometer designs shows that reduction of time constant by a factor of 3 and reduction of NETD by a factor of 1.5 can be achieved. Linear arrays of 512x3 microbolometers embedding the new designs have been fabricated for experimental validation.

Citation:
L. Ngo Phong, J. Lee, W. Zheng, T. D. Pope, C. Alain, S. Elias, H. Jerominek, "Next Generation Microbolometers for High Resolution Remote Sensing," icmens, pp.197-198, 2005 International Conference on MEMS,NANO and Smart Systems, 2005
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