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2005 International Conference on MEMS,NANO and Smart Systems
MEMS Relays/Switches
Banff, Alberta, Canada
July 24-July 27
ISBN: 0-7695-2398-6
ASCII Text
x 
 
Tiansheng Zhou, Yan Loke, "MEMS Relays/Switches," MEMS, NANO, and Smart Systems, International Conference on, pp. 235-236, 2005 International Conference on MEMS,NANO and Smart Systems, 2005.
 
 
BibTex
x
 
@article{ 10.1109/ICMENS.2005.7,
author = {Tiansheng Zhou and Yan Loke},
title = {MEMS Relays/Switches},
journal ={MEMS, NANO, and Smart Systems, International Conference on},
volume = {0},
year = {2005},
isbn = {0-7695-2398-6},
pages = {235-236},
doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.7},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - MEMS, NANO, and Smart Systems, International Conference on
TI - MEMS Relays/Switches
SN - 0-7695-2398-6
SP235
EP236
A1 - Tiansheng Zhou,
A1 - Yan Loke,
PY - 2005
KW - null
VL - 0
JA - MEMS, NANO, and Smart Systems, International Conference on
ER -
 
Tiansheng Zhou, Micralyne Inc., Edmonton, Canada
Yan Loke, Micralyne Inc., Edmonton, Canada

This paper summarizes the design, microfabrication, simulation and characterization of MEMS relays. The lateral electrostatic driven relay has advantages of simple design and easy microfabrication, low voltage actuation, combination of micro relays to extend their electrical power handling as well as very low coupling loss for RF signal applications.

Citation:
Tiansheng Zhou, Yan Loke, "MEMS Relays/Switches," icmens, pp.235-236, 2005 International Conference on MEMS,NANO and Smart Systems, 2005
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