Micro Systems Technology: the way to shrink sunsensors

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2005 International Conference on MEMS,NANO and Smart Systems

Banff, Alberta, Canada

July 24-July 27

ISBN: 0-7695-2398-6

	ASCII Text	x
	Johan Leijtens, Kees de Boom, Nico van der Heiden, "Micro Systems Technology: the way to shrink sunsensors," MEMS, NANO, and Smart Systems, International Conference on, pp. 193-194, 2005 International Conference on MEMS,NANO and Smart Systems, 2005.

	BibTex	x
	@article{ 10.1109/ICMENS.2005.68, author = {Johan Leijtens and Kees de Boom and Nico van der Heiden}, title = {Micro Systems Technology: the way to shrink sunsensors}, journal ={MEMS, NANO, and Smart Systems, International Conference on}, volume = {0}, year = {2005}, isbn = {0-7695-2398-6}, pages = {193-194}, doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.68}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, }

	RefWorks Procite/RefMan/Endnote	x
	TY - CONF JO - MEMS, NANO, and Smart Systems, International Conference on TI - Micro Systems Technology: the way to shrink sunsensors SN - 0-7695-2398-6 SP193 EP194 A1 - Johan Leijtens, A1 - Kees de Boom, A1 - Nico van der Heiden, PY - 2005 KW - null VL - 0 JA - MEMS, NANO, and Smart Systems, International Conference on ER -

Johan Leijtens, TNO Science and industry, Postbus 155, 2600

Kees de Boom, TNO Science and industry, Postbus 155, 2600

Nico van der Heiden, TNO Science and industry, Postbus 155, 2600

DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.68

High reliability Sun sensors are currently build using silicon detectors and aperture masks which are supported at an accurate distance above the sensitive detector surface. By using micro systems technologies like bulk and surface micro machining and wafer level bonding, highly precise and accurate sensors can be devised that are expected to have comparable performance but much smaller dimensions and mass.

Citation:

Johan Leijtens, Kees de Boom, Nico van der Heiden, "Micro Systems Technology: the way to shrink sunsensors," icmens, pp.193-194, 2005 International Conference on MEMS,NANO and Smart Systems, 2005

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