LIGA Cavity Resonator for K-Band Applications

I
ICMENS
2005
2005 International Conference on MEMS,NANO and Smart Systems
Abstract - LIGA Cavity Resonator for K-Band Applications

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2005 International Conference on MEMS,NANO and Smart Systems

Banff, Alberta, Canada

July 24-July 27

ISBN: 0-7695-2398-6

	ASCII Text	x
	Z. Ma, D. M. Klymyshyn, S. Achenbach, "LIGA Cavity Resonator for K-Band Applications," MEMS, NANO, and Smart Systems, International Conference on, pp. 106-109, 2005 International Conference on MEMS,NANO and Smart Systems, 2005.

	BibTex	x
	@article{ 10.1109/ICMENS.2005.65, author = {Z. Ma and D. M. Klymyshyn and S. Achenbach}, title = {LIGA Cavity Resonator for K-Band Applications}, journal ={MEMS, NANO, and Smart Systems, International Conference on}, volume = {0}, year = {2005}, isbn = {0-7695-2398-6}, pages = {106-109}, doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.65}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, }

	RefWorks Procite/RefMan/Endnote	x
	TY - CONF JO - MEMS, NANO, and Smart Systems, International Conference on TI - LIGA Cavity Resonator for K-Band Applications SN - 0-7695-2398-6 SP106 EP109 A1 - Z. Ma, A1 - D. M. Klymyshyn, A1 - S. Achenbach, PY - 2005 KW - null VL - 0 JA - MEMS, NANO, and Smart Systems, International Conference on ER -

Z. Ma, TRLabs, 111 - 116 Research Drive, Saskatoon, Saskatchewan, CANADA, S7N 3R3

D. M. Klymyshyn, Department of Electrical Engineering, University of Saskatchewan

S. Achenbach, Institute for Microstructure Technology (IMT), Forschungszentrum Karlsruhe, Germany

DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.65

A 2-mm deep microwave cavity resonator is proposed for LIGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q) factor. Simulation using 3-D finite element method (FEM) shows an unloaded Q (Qu) very close to the theoretical calculation. Feasibility of obtaining such cavities with hard X-ray lithography (XRL) is demonstrated.

Citation:

Z. Ma, D. M. Klymyshyn, S. Achenbach, "LIGA Cavity Resonator for K-Band Applications," icmens, pp.106-109, 2005 International Conference on MEMS,NANO and Smart Systems, 2005

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