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2005 International Conference on MEMS,NANO and Smart Systems
CYCLO-OLEFIN POLYMER DIRECT BONDING USING LOW TEMPERATURE PLASMA ACTIVATION BONDING
Banff, Alberta, Canada
July 24-July 27
ISBN: 0-7695-2398-6
ASCII Text
x 
 
Jun Mizuno, Sharon Farrens, Viorel Dragoi, Thomas Glinsner, Hiroyuki Ishida, Hidetoshi Shinohara, Takafumi Suzuki, Masanori Ishizuka, Shuichi Shoji, "CYCLO-OLEFIN POLYMER DIRECT BONDING USING LOW TEMPERATURE PLASMA ACTIVATION BONDING," MEMS, NANO, and Smart Systems, International Conference on, pp. 346-352, 2005 International Conference on MEMS,NANO and Smart Systems, 2005.
 
 
BibTex
x
 
@article{ 10.1109/ICMENS.2005.37,
author = {Jun Mizuno and Sharon Farrens and Viorel Dragoi and Thomas Glinsner and Hiroyuki Ishida and Hidetoshi Shinohara and Takafumi Suzuki and Masanori Ishizuka and Shuichi Shoji},
title = {CYCLO-OLEFIN POLYMER DIRECT BONDING USING LOW TEMPERATURE PLASMA ACTIVATION BONDING},
journal ={MEMS, NANO, and Smart Systems, International Conference on},
volume = {0},
year = {2005},
isbn = {0-7695-2398-6},
pages = {346-352},
doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.37},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - MEMS, NANO, and Smart Systems, International Conference on
TI - CYCLO-OLEFIN POLYMER DIRECT BONDING USING LOW TEMPERATURE PLASMA ACTIVATION BONDING
SN - 0-7695-2398-6
SP346
EP352
A1 - Jun Mizuno,
A1 - Sharon Farrens,
A1 - Viorel Dragoi,
A1 - Thomas Glinsner,
A1 - Hiroyuki Ishida,
A1 - Hidetoshi Shinohara,
A1 - Takafumi Suzuki,
A1 - Masanori Ishizuka,
A1 - Shuichi Shoji,
PY - 2005
KW - null
VL - 0
JA - MEMS, NANO, and Smart Systems, International Conference on
ER -
 
Jun Mizuno, Nanotechnology Research Laboratory, Waseda University, Japan
Sharon Farrens, EV Group, E. Thallner GmbH, Austria
Viorel Dragoi, EV Group, E. Thallner GmbH, Austria
Thomas Glinsner, Nanotechnology Research Laboratory, Waseda University, Japan
Hiroyuki Ishida, EV Group Japan K.K., Japan
Hidetoshi Shinohara, Department of Electrical Engineering and Bioscience Engineering, Waseda University, Japan
Takafumi Suzuki, Department of Electrical Engineering and Bioscience Engineering, Waseda University, Japan
Masanori Ishizuka, Department of Electrical Engineering and Bioscience Engineering, Waseda University, Japan
Shuichi Shoji, Department of Electrical Engineering and Bioscience Engineering, Waseda University, Japan

Low temperature direct bonding method of Cyclo- Olefin Polymer (COP) plates (20mm x 40mm x 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

Citation:
Jun Mizuno, Sharon Farrens, Viorel Dragoi, Thomas Glinsner, Hiroyuki Ishida, Hidetoshi Shinohara, Takafumi Suzuki, Masanori Ishizuka, Shuichi Shoji, "CYCLO-OLEFIN POLYMER DIRECT BONDING USING LOW TEMPERATURE PLASMA ACTIVATION BONDING," icmens, pp.346-352, 2005 International Conference on MEMS,NANO and Smart Systems, 2005
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