A New Method of Electrostatic Force Modeling for MEMS Sensors and Actuators

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2005 International Conference on MEMS,NANO and Smart Systems

Banff, Alberta, Canada

July 24-July 27

ISBN: 0-7695-2398-6

	ASCII Text	x
	Sazzadur Chowdhury, M. Ahmadi, W. C. Miller, "A New Method of Electrostatic Force Modeling for MEMS Sensors and Actuators," MEMS, NANO, and Smart Systems, International Conference on, pp. 431-435, 2005 International Conference on MEMS,NANO and Smart Systems, 2005.

	BibTex	x
	@article{ 10.1109/ICMENS.2005.16, author = {Sazzadur Chowdhury and M. Ahmadi and W. C. Miller}, title = {A New Method of Electrostatic Force Modeling for MEMS Sensors and Actuators}, journal ={MEMS, NANO, and Smart Systems, International Conference on}, volume = {0}, year = {2005}, isbn = {0-7695-2398-6}, pages = {431-435}, doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.16}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, }

	RefWorks Procite/RefMan/Endnote	x
	TY - CONF JO - MEMS, NANO, and Smart Systems, International Conference on TI - A New Method of Electrostatic Force Modeling for MEMS Sensors and Actuators SN - 0-7695-2398-6 SP431 EP435 A1 - Sazzadur Chowdhury, A1 - M. Ahmadi, A1 - W. C. Miller, PY - 2005 KW - null VL - 0 JA - MEMS, NANO, and Smart Systems, International Conference on ER -

Sazzadur Chowdhury, Department of Electrical and Computer Engineering University of Windsor Windsor, Ontario, N9B 3P4 Canada

M. Ahmadi, Department of Electrical and Computer Engineering University of Windsor Windsor, Ontario, N9B 3P4 Canada

W. C. Miller, Department of Electrical and Computer Engineering University of Windsor Windsor, Ontario, N9B 3P4 Canada

DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.16

A new highly accurate method to determine the electrostatic forces associated with fixed-fixed beam geometry electrostatic sensors and actuators has been presented. Meijs and Fokkema?s highly accurate empirical formula for the capacitance of a rectangular cross-section VLSI on-chip interconnect has been used to determine the electrostatic forces that includes the fringing field effects. The method has been verified by developing a pull-in voltage expression based on the new method and the results are compared with published experimentally verified 3-D electromechanical finite element analysis (FEA) results. The new method determined pull-in voltages are in excellent agreement with FEA results verifying the method?s accuracy.

Citation:

Sazzadur Chowdhury, M. Ahmadi, W. C. Miller, "A New Method of Electrostatic Force Modeling for MEMS Sensors and Actuators," icmens, pp.431-435, 2005 International Conference on MEMS,NANO and Smart Systems, 2005

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