Many low temperature techniques exist for the deposition of polymer material. However, existing techniques require macroscopic substrates and are therefore inadequate for small, released microfabricated parts. We present a method for depositing material on microparts or substrates which utilizes a macroscopic solubility change to induce microscopic precipitation and selective deposition. Selectivity was achieved by modification of surface energy using self-assembled monolayers. We term this method insoluble liquid energy minimization, or ILEM. Macroscale substrates were used to characterize ILEM, and the method was applied to 20-100 ?m-sized microfabricated parts which self-assembled into threedimensional microstructures.