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2005 International Conference on MEMS,NANO and Smart Systems
Stick-slip Actuation of Electrostatic Stepper Micropositioners for Data Storage - the ?Walker
Banff, Alberta, Canada
July 24-July 27
ISBN: 0-7695-2398-6
ASCII Text
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Mihai Patrascu, Stefano Stramigioli, "Stick-slip Actuation of Electrostatic Stepper Micropositioners for Data Storage - the ?Walker," MEMS, NANO, and Smart Systems, International Conference on, pp. 81-86, 2005 International Conference on MEMS,NANO and Smart Systems, 2005.
 
 
BibTex
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@article{ 10.1109/ICMENS.2005.112,
author = {Mihai Patrascu and Stefano Stramigioli},
title = {Stick-slip Actuation of Electrostatic Stepper Micropositioners for Data Storage - the ?Walker},
journal ={MEMS, NANO, and Smart Systems, International Conference on},
volume = {0},
year = {2005},
isbn = {0-7695-2398-6},
pages = {81-86},
doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.112},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - MEMS, NANO, and Smart Systems, International Conference on
TI - Stick-slip Actuation of Electrostatic Stepper Micropositioners for Data Storage - the ?Walker
SN - 0-7695-2398-6
SP81
EP86
A1 - Mihai Patrascu,
A1 - Stefano Stramigioli,
PY - 2005
KW - null
VL - 0
JA - MEMS, NANO, and Smart Systems, International Conference on
ER -
 
Mihai Patrascu, Univ. of Twente, The Netherlands Control Engineering Laboratory
Stefano Stramigioli, Univ. of Twente, The Netherlands Control Engineering Laboratory

This paper is about the ?Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7mN for ranges as large as 140?m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the ?Walker. Several methods to obtain displacements smaller than one nominal step ( 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.

Citation:
Mihai Patrascu, Stefano Stramigioli, "Stick-slip Actuation of Electrostatic Stepper Micropositioners for Data Storage - the ?Walker," icmens, pp.81-86, 2005 International Conference on MEMS,NANO and Smart Systems, 2005
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