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2005 International Conference on MEMS,NANO and Smart Systems
RF MEMS Tunable Inductor Using Bimorph Microactuators
Banff, Alberta, Canada
July 24-July 27
ISBN: 0-7695-2398-6

Inductors play an important role in wireless frontend circuitry. Tunable inductors can provide more flexibility in optimizing RF devices such as filtes and VCOs. A tunable inductor using a process fully compatible with CMOS has been constructed. The tuning range achieved was 30%.

Citation:
Imed Zine-El-Abidine, Michal Okoniewski, John G. McRory, "RF MEMS Tunable Inductor Using Bimorph Microactuators," icmens, pp.436-437, 2005 International Conference on MEMS,NANO and Smart Systems, 2005
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