2005 International Conference on MEMS,NANO and Smart Systems Pulse-actuated micromechanical resonator using digital Kalman observer Banff, Alberta, Canada July 24-July 27 ISBN: 0-7695-2398-6
The paper presents a digital oscillating loop for a MEMS resonator in which the instantaneous resonator position is estimated on-line with a Kalman observer. The approach is applied to an oscillating loop with a pulse-actuated ?mechanical resonator, where the predicted resonator position can be used for oscillation amplitude control or resonator parameters measurement. We demonstrate the very good immunity of the method toward internal system and measurement noises.
Index Terms:
Resonant sensor, Kalman observer,estimation, sigma-delta conversion
Citation:
Eric Colinet, Dimitri Galayko, J?r?me Juillard, "Pulse-actuated micromechanical resonator using digital Kalman observer," icmens, pp.449-453, 2005 International Conference on MEMS,NANO and Smart Systems, 2005 Usage of this product signifies your acceptance of the Terms of Use. | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
Digg
Furl
Spurl
Blink
Simpy
Google
Del.icio.us
Y!MyWeb