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2005 International Conference on MEMS,NANO and Smart Systems
Pulse-actuated micromechanical resonator using digital Kalman observer
Banff, Alberta, Canada
July 24-July 27
ISBN: 0-7695-2398-6
Eric Colinet, Sup?lec, Gif-sur-Yvette, France
Dimitri Galayko, Sup?lec, Gif-sur-Yvette, France
J?r?me Juillard, Sup?lec, Gif-sur-Yvette, France

The paper presents a digital oscillating loop for a MEMS resonator in which the instantaneous resonator position is estimated on-line with a Kalman observer. The approach is applied to an oscillating loop with a pulse-actuated ?mechanical resonator, where the predicted resonator position can be used for oscillation amplitude control or resonator parameters measurement. We demonstrate the very good immunity of the method toward internal system and measurement noises.

Index Terms:
Resonant sensor, Kalman observer,estimation, sigma-delta conversion
Citation:
Eric Colinet, Dimitri Galayko, J?r?me Juillard, "Pulse-actuated micromechanical resonator using digital Kalman observer," icmens, pp.449-453, 2005 International Conference on MEMS,NANO and Smart Systems, 2005
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