2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03) Nonlinear Effects in MEMS Capacitive Microphone Design Banff, Alberta, Canada July 20-July 23 ISBN: 0-7695-1947-4
An analytical method is presented that provides a better approximation for design parameter values of a MEMS capacitive microphone. The spring softening effect associated with the nonlinear characteristics of the electrostatic pressure due to a bias voltage, and the spring hardening effect associated with nonlinear stretching of the central region of a uniformly loaded fully clamped diaphragm with residual stress are both considered. The method allows a more accurate determination of the developed electrostatic pressure, maximum diaphragm deflection and the pull-in voltage. The resulting electrostatic pressure, pull-in voltage and deflection profile of the diaphragm are in close agreement with finite element analysis results.
Index Terms:
MEMS, capacitive microphone, pull-in voltage, nonlinearity, diaphragm deformation, electrostatic force
Citation:
Sazzadur Chowdhury, M. Ahmadi, W. C. Miller, "Nonlinear Effects in MEMS Capacitive Microphone Design," icmens, pp.297, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003 Usage of this product signifies your acceptance of the Terms of Use. | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||