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2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03)
Dynamics and Touchdown in Electrostatic MEMS
Banff, Alberta, Canada
July 20-July 23
ISBN: 0-7695-1947-4
ASCII Text
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Gilberto Flores, Gema A. Mercado, John A. Pelesko, "Dynamics and Touchdown in Electrostatic MEMS," MEMS, NANO, and Smart Systems, International Conference on, pp. 182, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003.
 
 
BibTex
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@article{ 10.1109/ICMENS.2003.1221990,
author = {Gilberto Flores and Gema A. Mercado and John A. Pelesko},
title = {Dynamics and Touchdown in Electrostatic MEMS},
journal ={MEMS, NANO, and Smart Systems, International Conference on},
volume = {0},
year = {2003},
isbn = {0-7695-1947-4},
pages = {182},
doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2003.1221990},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - MEMS, NANO, and Smart Systems, International Conference on
TI - Dynamics and Touchdown in Electrostatic MEMS
SN - 0-7695-1947-4
SP
EP
A1 - Gilberto Flores,
A1 - Gema A. Mercado,
A1 - John A. Pelesko,
PY - 2003
KW - null
VL - 0
JA - MEMS, NANO, and Smart Systems, International Conference on
ER -
 
Gilberto Flores, Universidad Nacional Autónoma de México
Gema A. Mercado, Universidad Autónoma de Zacatecas
John A. Pelesko, University of Delaware
A mathematical model of an idealized electrostatically actuated MEMS or NEMS device is presented for the purpose of studying the dynamics of the so-called "pull-in" instability. This arises when applied voltages are increased beyond a certain critical voltage where steady-state solutions cease to exist. A reduced one-dimensional nonlinear reaction-diffusion equation representing an idealized electrostatic structure is derived and analyzed. The coefficient tuning the nonlinear part determines existence of steady-state solutions. Questions about where, when, and how touchdown occurs are answered. A summary of new findings is presented and formal analytical results are compared with numerical approximations.
Citation:
Gilberto Flores, Gema A. Mercado, John A. Pelesko, "Dynamics and Touchdown in Electrostatic MEMS," icmens, pp.182, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003
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