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2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03)
Monolayer Surface Coatings Solve Stiction and Drift Problems in MEMS
Banff, Alberta, Canada
July 20-July 23
ISBN: 0-7695-1947-4
ASCII Text
x 
 
Xiaoyang Zhu, "Monolayer Surface Coatings Solve Stiction and Drift Problems in MEMS," MEMS, NANO, and Smart Systems, International Conference on, pp. 128, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003.
 
 
BibTex
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@article{ 10.1109/ICMENS.2003.1221979,
author = {Xiaoyang Zhu},
title = {Monolayer Surface Coatings Solve Stiction and Drift Problems in MEMS},
journal ={MEMS, NANO, and Smart Systems, International Conference on},
volume = {0},
year = {2003},
isbn = {0-7695-1947-4},
pages = {128},
doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2003.1221979},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - MEMS, NANO, and Smart Systems, International Conference on
TI - Monolayer Surface Coatings Solve Stiction and Drift Problems in MEMS
SN - 0-7695-1947-4
SP
EP
A1 - Xiaoyang Zhu,
PY - 2003
KW - null
VL - 0
JA - MEMS, NANO, and Smart Systems, International Conference on
ER -
 
Xiaoyang Zhu, MicroSurfaces, Inc.
This paper reports recent developments in monolayer surface coating process to solve stiction and drift problems in MEMS devices. The chemical strategy for the formation of high density and conformal monolayers is presented, and performance characteristics of these coatings on existing or emerging MEMS products will be discussed. Recent tests on electro-statically actuated micro-mirror devices show that a densely packed monolayer can withstand up to 100 billion cycles of contacts.
Citation:
Xiaoyang Zhu, "Monolayer Surface Coatings Solve Stiction and Drift Problems in MEMS," icmens, pp.128, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003
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