2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03) Effects of Electrostatic Charge Accumulation During MEMS Fabrication Banff, Alberta, Canada July 20-July 23 ISBN: 0-7695-1947-4
Electrostatic charge transfer during the MEMS fabrication processes poses problems when the charge accumulates on the MEMS device. This can cause both particle attraction to the charged micro-system or its components as well as malfunctions. An example of the effects of such phenomena is presented for the case of an electrostatic comb drive, where parts of the device are contaminated through electrostatic attraction (ESA). The results of the electrostatic field measurements performed during one fabrication process in MEMS devices are shown and a solution for overcoming the ESA effects is proposed.
Citation:
Angela Antoniu, Mark Salomons, Nicolae Reus, "Effects of Electrostatic Charge Accumulation During MEMS Fabrication," icmens, pp.69, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003 Usage of this product signifies your acceptance of the Terms of Use. | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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