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Seventh IEEE/ACIS International Conference on Computer and Information Science (icis 2008)
An Integer Linear Programming Approach for Dedicated Machine Constraint
May 14-May 16
ISBN: 978-0-7695-3131-1
Dedicated machine constraint is one of the new challenges introduced in photolithography machinery of the semiconductor manufacturing system due to natural bias. Previous researches either did not take the constraint into account or the proposed heuristic approach might not fit the fast-changing market of semiconductor manufacturing. In this paper, we propose a new framework for the issue of the dedicated machine constraint in semiconductor manufacturing based on an Integer Linear Program (ILP) framework. The ILP framework provides an efficient approach to minimize the producing cost and obtain a global optimal solution in an efficient time. We also present the experiments to validate the proposed approach.
Index Terms:
Dedicated Machine Constraint, Integer Linear Programming, Semiconductor Manufacturing, Photolithography
Citation:
Huy Nguyen Anh Pham, Arthur Shr, Peter P. Chen, "An Integer Linear Programming Approach for Dedicated Machine Constraint," icis, pp.69-74, Seventh IEEE/ACIS International Conference on Computer and Information Science (icis 2008), 2008
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