MEMS-Based Capacitor Arrays for Programmable Interconnect and RF Applications

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	Similar Articles Articles by B.E. Duewer Articles by J.M. Wilson Articles by D.A. Winick Articles by P.D. Franzon

20th Anniversary Conference on Advanced Research in VLSI

Atlanta, Georgia

March 21-March 24

ISBN: 0-7695-0056-0

	ASCII Text	x
	B.E. Duewer, J.M. Wilson, D.A. Winick, P.D. Franzon, "MEMS-Based Capacitor Arrays for Programmable Interconnect and RF Applications," Advanced Research in VLSI, Conference on, pp. 369, 20th Anniversary Conference on Advanced Research in VLSI, 1999.

	BibTex	x
	@article{ 10.1109/ARVLSI.1999.756061, author = {B.E. Duewer and J.M. Wilson and D.A. Winick and P.D. Franzon}, title = {MEMS-Based Capacitor Arrays for Programmable Interconnect and RF Applications}, journal ={Advanced Research in VLSI, Conference on}, volume = {0}, year = {1999}, issn = {1522-869X}, pages = {369}, doi = {http://doi.ieeecomputersociety.org/10.1109/ARVLSI.1999.756061}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, }

	RefWorks Procite/RefMan/Endnote	x
	TY - CONF JO - Advanced Research in VLSI, Conference on TI - MEMS-Based Capacitor Arrays for Programmable Interconnect and RF Applications SN - 1522-869X SP EP A1 - B.E. Duewer, A1 - J.M. Wilson, A1 - D.A. Winick, A1 - P.D. Franzon, PY - 1999 KW - MEMS KW - Variable Capacitors KW - Programable Interconnect KW - RF Switching KW - Crossbar KW - Digital Switching KW - Bistable Devices KW - Capacitive Coupling VL - 0 JA - Advanced Research in VLSI, Conference on ER -

B.E. Duewer, North Carolina State University

J.M. Wilson, North Carolina State University

D.A. Winick, North Carolina State University

P.D. Franzon, North Carolina State University

DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/ARVLSI.1999.756061

We describe a programmable capacitor technology under development at NCSU and its potential application in building programmable interconnect devices useful for system level connectivity functions, phased array beam steering, and RF switching. Crossbars are made from arrays of electrostatically controlled bistable MEMS-based capacitors. These new devices allow faster signaling and consume less power than BiCMOS (or even CMOS) crossbars. We describe the essential elements of these arrays and present results obtained so far.

Index Terms:

MEMS, Variable Capacitors, Programable Interconnect, RF Switching, Crossbar, Digital Switching, Bistable Devices, Capacitive Coupling

Citation:

B.E. Duewer, J.M. Wilson, D.A. Winick, P.D. Franzon, "MEMS-Based Capacitor Arrays for Programmable Interconnect and RF Applications," arvlsi, pp.369, 20th Anniversary Conference on Advanced Research in VLSI, 1999

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