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17th Conference on Advanced Research in VLSI (ARVLSI '97)
Trends of Key Advanced Device Technologies
Ann Arbor, MI
September 15-September 16
ISBN: 0-8186-7913-1
B. Chester Hwang, Motorola Inc., USA
Silicon CMOS technology has followed Moore's law over the past two decodes. It is still on the predicted curve, and it appears that the trend will continue into the next decade. The SIA roadmap published by Sematech in 1994 predicted the progress of semiconductor technology fairly well. Expectations based on the SIA roadmap are now being exceeded; for example, as announced by many companies, the projected 0.25 /spl mu/m production in 1998 will be met in 1997. Other technologies continue to make progress, along with silicon CMOS technology. The distinctive ones are Thin Film Silicon on insulator (TFSOI), Complementary Gallium Arsenide (CGaAs), and Graded-Channel CMOS (GCMOS). This paper will discuss the status, potential and hurdles of these technologies.
Index Terms:
CMOS integrated circuits, CMOS technology, Moore's law, SIA roadmap, Sematech, TFSOI, graded-channel CMOS, complementary IC technology, 0.25 micron, Si, GaAs
Citation:
B. Chester Hwang, "Trends of Key Advanced Device Technologies," arvlsi, pp.78, 17th Conference on Advanced Research in VLSI (ARVLSI '97), 1997
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