DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/54.587739
To move microsystems from research prototypes to an industrial market, CMP, the French multiproject wafer service, has adapted an existing commercial tool to the automated design of micromachined devices.
Citation:
Jean Michel Karam, Bernard Courtois, Hicham Boutamine, "CAD Tools for Bridging Microsystems and Foundries," IEEE Design and Test of Computers, vol. 14, no. 2, pp. 34-39, Apr.-June 1997, doi:10.1109/54.587739 Usage of this product signifies your acceptance of the Terms of Use. | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||