Kholdoun Torki, Bernard Courtois, "Advanced Low Cost Manufacturing From CMP Service," Microelectronics Systems Education, IEEE International Conference on/Multimedia Software Engineering, International Symposium on, pp. 4, IEEE International Conference on Microelectronic Systems Education, 1999.

@article{ 10.1109/MSE.1999.787009,
author = {Kholdoun Torki and Bernard Courtois},
title = {Advanced Low Cost Manufacturing From CMP Service},
journal ={Microelectronics Systems Education, IEEE International Conference on/Multimedia Software Engineering, International Symposium on},
volume = {0},
year = {1999},
issn = {1530-2024},
pages = {4},
doi = {http://doi.ieeecomputersociety.org/10.1109/MSE.1999.787009},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}

TY - CONF
JO - Microelectronics Systems Education, IEEE International Conference on/Multimedia Software Engineering, International Symposium on
TI - Advanced Low Cost Manufacturing From CMP Service
SN - 1530-2024
SP
EP
A1 - Kholdoun Torki,
A1 - Bernard Courtois,
PY - 1999
VL - 0
JA - Microelectronics Systems Education, IEEE International Conference on/Multimedia Software Engineering, International Symposium on
ER -