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International Test Conference 2003 (ITC'03)
Infrastructure IP for Back-End Yield Improvement
Charlotte, NC, USA
September 30-October 02
ISBN: 0-7803-8107-6
ASCII Text
x 
 
L. Forli, J. M. Portal, D. N?, B. Borot, "Infrastructure IP for Back-End Yield Improvement," Test Conference, International, pp. 1129, International Test Conference 2003 (ITC'03), 2003.
 
 
BibTex
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@article{ 10.1109/TEST.2003.1271101,
author = {L. Forli and J. M. Portal and D. N? and B. Borot},
title = {Infrastructure IP for Back-End Yield Improvement},
journal ={Test Conference, International},
volume = {0},
year = {2003},
issn = {1089-3539},
pages = {1129},
doi = {http://doi.ieeecomputersociety.org/10.1109/TEST.2003.1271101},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - Test Conference, International
TI - Infrastructure IP for Back-End Yield Improvement
SN - 1089-3539
SP
EP
A1 - L. Forli,
A1 - J. M. Portal,
A1 - D. N?,
A1 - B. Borot,
PY - 2003
KW - null
VL - 0
JA - Test Conference, International
ER -
 
L. Forli, IMT - Technop?le de Ch?teau Gombert, France; ST-Microelectronics, France
J. M. Portal, IMT - Technop?le de Ch?teau Gombert, France
D. N?, ST-Microelectronics, France
B. Borot, ST-Microelectronics, France
The objective of this paper is to present an infrastructure IP (I-IP) designed to characterize yield loss in the process back-end. The I-IP structure is described in using a bottom-up approach with emphasis on its scalability. Using this infrastructure IP, the defect density tracking as well as the test and diagnosis of process back-end critical parameters can be quickly and easily performed. To reach this goal, the test flow and its related signature extraction is given. Thus, the use of this I-IP allows to improve the manufacturing process by diagnosing the back-end yield loss.
Citation:
L. Forli, J. M. Portal, D. N?, B. Borot, "Infrastructure IP for Back-End Yield Improvement," itc, pp.1129, International Test Conference 2003 (ITC'03), 2003
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