Deformations of IC Structure in Test and Yield Learning

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	Similar Articles Articles by W. Maly Articles by A. Gattiker Articles by T. Zanon Articles by T. Vogels Articles by R. D. Blanton Articles by T. Storey

International Test Conference 2003 (ITC'03)

Charlotte, NC, USA

September 30-October 02

ISBN: 0-7803-8107-6

	ASCII Text	x
	W. Maly, A. Gattiker, T. Zanon, T. Vogels, R. D. Blanton, T. Storey, "Deformations of IC Structure in Test and Yield Learning," Test Conference, International, pp. 856, International Test Conference 2003 (ITC'03), 2003.

	BibTex	x
	@article{ 10.1109/TEST.2003.1271071, author = {W. Maly and A. Gattiker and T. Zanon and T. Vogels and R. D. Blanton and T. Storey}, title = {Deformations of IC Structure in Test and Yield Learning}, journal ={Test Conference, International}, volume = {0}, year = {2003}, issn = {1089-3539}, pages = {856}, doi = {http://doi.ieeecomputersociety.org/10.1109/TEST.2003.1271071}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, }

	RefWorks Procite/RefMan/Endnote	x
	TY - CONF JO - Test Conference, International TI - Deformations of IC Structure in Test and Yield Learning SN - 1089-3539 SP EP A1 - W. Maly, A1 - A. Gattiker, A1 - T. Zanon, A1 - T. Vogels, A1 - R. D. Blanton, A1 - T. Storey, PY - 2003 KW - yield learning KW - fault modeling KW - defects KW - diagnosis KW - defect characterization VL - 0 JA - Test Conference, International ER -

W. Maly, Carnegie Mellon University, Pittsburgh, PA

A. Gattiker, IBM

T. Zanon, Carnegie Mellon University, Pittsburgh, PA

T. Vogels, Carnegie Mellon University, Pittsburgh, PA

R. D. Blanton, Carnegie Mellon University, Pittsburgh, PA

T. Storey, PDF Solutions

DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/TEST.2003.1271071

This paper argues that the existing approaches to modeling and characterization of IC malfunctions are inadequate for test and yield learning of Deep Sub-Micron (DSM) products. Traditional notions of a spot defect and local and global process variations are analyzed and their shortcomings are exposed. A detailed taxonomy of process-induced deformations of DSM IC structures, enabling modeling and characterization of IC malfunctions, is proposed. The blueprint of a roadmap enabling such a characterization is suggested.

Index Terms:

yield learning, fault modeling, defects, diagnosis, defect characterization

Citation:

W. Maly, A. Gattiker, T. Zanon, T. Vogels, R. D. Blanton, T. Storey, "Deformations of IC Structure in Test and Yield Learning," itc, pp.856, International Test Conference 2003 (ITC'03), 2003

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